Description: In this study, the authors investigated the effects of various source gases (methane, ethane, ethylene, and acetylene) on the friction and wear performance of diamondlike carbon (DLC) films prepared in a plasma enhanced chemical vapor deposition (PECVD) system. Films were deposited on AISI H13 steel substrates and tested in a pin-on-disk machine against DLC-coated M50 balls in dry nitrogen. They found a close correlation between friction coefficient and source gas composition. Specifically, films grown in source gases with higher hydrogen-to-carbon ratios exhibited lower friction coefficients and higher wear resistance than films grown in source gases with lower hydrogen-to-carbon (H/C) ratios. The lowest friction coefficient (0.014) was achieved with a film derived from methane with an WC ratio of 4, whereas the coefficient of films derived from acetylene (H/C = 1) was of 0.15. Similar correlations were observed for wear rates. Specifically, films derived from gases with lower H/C values were worn out and the substrate material was exposed, whereas films from methane and ethane remained intact and wore at rates that were nearly two orders of magnitude lower than films obtained from acetylene.
Date: January 18, 2000
Creator: Erdemir, A.; Nilufer, I. B.; Eryilmaz, O. L.; Beschliesser, M. & Fenske, G. R.
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