LIGA-based microsystem manufacturing:the electrochemistry of through-mold depostion and material properties.
Description:
The report presented below is to appear in ''Electrochemistry at the Nanoscale'', Patrik Schmuki, Ed. Springer-Verlag, (ca. 2005). The history of the LIGA process, used for fabricating dimensional precise structures for microsystem applications, is briefly reviewed, as are the basic elements of the technology. The principal focus however, is on the unique aspects of the electrochemistry of LIGA through-mask metal deposition and the generation of the fine and uniform microstructures necessary to…
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Date:
June 1, 2005
Creator:
Kelly, James J. (Sandia National Laboratories, Livermore, CA) & Goods, Steven Howard (Sandia National Laboratories, Livermore, CA)
Item Type:
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Report
Partner:
UNT Libraries Government Documents Department