Elimination of 'ghost'-effect-related systematic error in metrology of X-ray optics with a long trace profiler
Description:
A data acquisition technique and relevant program for suppression of one of the systematic effects, namely the ''ghost'' effect, of a second generation long trace profiler (LTP) is described. The ''ghost'' effect arises when there is an unavoidable cross-contamination of the LTP sample and reference signals into one another, leading to a systematic perturbation in the recorded interference patterns and, therefore, a systematic variation of the measured slope trace. Perturbations of about 1-2 {m…
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Date:
April 28, 2005
Creator:
Yashchuk, Valeriy V.; Irick, Steve C. & MacDowell, Alastair A.
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