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Wafer and reticle positioning system for the Extreme Ultraviolet Lithography Engineering Test Stand

Description: This paper is an overview of the wafer and reticle positioning system of the Extreme Ultraviolet Lithography (EUVL) Engineering Test Stand (ETS). EUVL represents one of the most promising technologies for supporting the integrated circuit (IC) industry's lithography needs for critical features below 100nm. EUVL research and development includes development of capabilities for demonstrating key EUV technologies. The ETS is under development at the EUV Virtual National Laboratory, to demonstrate EUV full-field imaging and provide data that supports production-tool development. The stages and their associated metrology operated in a vacuum environment and must meet stringent outgassing specifications. A tight tolerance is placed on the stage tracking performance to minimize image distortion and provide high position repeatability. The wafer must track the reticle with less than {+-}3nm of position error and jitter must not exceed 10nm rms. To meet these performance requirements, magnetically levitated positioning stages utilizing a system of sophisticated control electronics will be used. System modeling and experimentation have contributed to the development of the positioning system and results indicate that desired ETS performance is achievable.
Date: January 27, 2000
Partner: UNT Libraries Government Documents Department

Advanced Techniques for Real-Time Visualization of Data Intensive Missions

Description: Engineers at Sandia National Laboratories are combining entertainment industry software with traditional data collection techniques to create an interactive visualization tool. By replacing the usual flight simulator joystick with a telemetry data stream, experimental data is combined with existing three-dimensional (3D) engineering models. Users are immersed in their experiment, allowing interaction with and comprehension of complex data sets. Software tools are currently under development for post flight data visualization, and their usefulness and reusability have been demonstrated on numerous spaced-based programs within Sandia. However, data from remote sensors are subject to transmission errors that yield nonphysical behavior in real-time data visualization applications. We propose to investigate the applicability of real-time processing algorithms and estimation theories, such as Kalman filters, that have been successfully applied in other fields. Results will be integrated into existing postflight visualization tools for Proof-of-Concept validation and for potential integration of real-time applications.
Date: January 1, 2001
Partner: UNT Libraries Government Documents Department

PREDICT User's Manual

Description: Sandia National Laboratories has developed a Near Real Time Range Safety Analysis Tool named PREDICT that is based upon a probabilistic range safety analysis process. Probabilistic calculations of risk may be used in place of the total containment of potentially hazardous debris during a missile launch operation. Impact probabilities are computed based upon probabilistic density functions, Monte Carlo trajectories of dispersion events, and missile failure scenarios. Impact probabilities are then coupled with current demographics (land populations, commercial and military ship traffic, and aircraft traffic) to produce expected casualty predictions for a particular launch window. Historically, these calculations required days of computer time to finalize. Sandia has developed a process that utilizes the IBM SP machines at the Maui High Performance Computing Center and at the Arctic Region Supercomputing Center to reduce the computation time from days to as little as an hour or two. This analysis tool then allows the Missile Flight Safety Officer to make launch decisions based on the latest information (winds, ship, and aircraft movements) utilizing an intelligent risk management approach. This report provides a user's manual for PREDICT version 3.3.
Date: July 1, 2002
Creator: Young, Larry W. & Sturgis, Beverly R.
Partner: UNT Libraries Government Documents Department