Origin of the Time-Dependence of Wet Oxidation of AlGaAs
Description:
The time-dependence of the wet oxidation of high-Al-content AlGaAs can be either linear, indicating reaction-rate limitation, or parabolic, indicating diffusion-limited rates. The transition from linear to parabolic time dependence can be explained by the increased rate of the formation of intermediate As{sub 2}O{sub 3} vs. its reduction to elemental As. A steadily increasing thickness of the As{sub 2}O{sub 3}-containing region at the oxidation front will shift the process from the linear to th…
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Date:
February 15, 1999
Creator:
Allerman, A. A.; Ashby, C. I. H.; Bridges, M. M.; Hammons, B. E. & Hou, H. Q.
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