Thin-film characterization and flaw detection. Final report, February 1, 1993--November 31, 1997
Description:
The objectives were to determine the elastic constants of thin films deposited on substrates, to measure residual stress and to detect and characterize defects in thin film substrate configurations. There are many present and potential applications of configurations consisting of a thin film deposited on a substrate. Thin films that are deposited to improve the hardness and/or the thermal properties of surfaces were of principal interest in this work. Thin film technology does, however, also in…
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Date:
February 25, 1998
Creator:
Achenbach, J. D.
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Partner:
UNT Libraries Government Documents Department