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Thin film conductive polymer for microactuator and micromuscle applications

Description: Conductive polymer/polyimide bimorphic microcantilevers have been actuated vertically (out-of-plane) upon the volumetric changes induced by electrochemical doping of the polymer. The microcantilevers that are 200-500 {mu}m in length and 50-100 {mu}m in width can be fully extended from a circularly-curled geometry, and thus generate more than 100 {mu}m displacement. Dynamically the microcantilevers have been driven as fast as 1.2 Hz and the polymer was stable for over a week stored in air and light. Residual stresses in the polymer film is estimated to be as high as 254 MPa, and actuation stresses are as high as 50 MPa.
Date: April 14, 1994
Creator: Lee, A.P.; Hong, K.; Trevino, J. & Northrup, M.A.
Partner: UNT Libraries Government Documents Department

A low power, tight seal, polyimide electrostatic microvalve

Description: An electrostatically-actuated polyimide microvalve is developed with sub-micron gaps between the electrodes to provide high force with low power consumption (< 1 mW). Built-in residual stress results in a curled bimorph cantilever which allows for a n-Licroactuator with large displacement. This microactuator is used to open and close a fluid path hole etched in silicon for a microvalve. The microactuator can be actuated with 25V for a displacement of 200 {mu}m. The cantilever actuator is mainly composed of polyimide, which is flexible enough to conform over the flow hole, thereby eliminating the need for the design of a valve seat.
Date: April 17, 1996
Creator: Lee, A.P.; Hamilton, J. & Trevino, J.
Partner: UNT Libraries Government Documents Department