6 Matching Results

Willis Library will be without power on Tuesday, August 20, 2019 from 5:00-7:00 AM CDT. All websites and web services will be down during this period.

Search Results

Wafer Fabrication Monitoring/Control System and Method

Description: Patent relating to systems and methods for monitoring and testing patterning processes including etching, cleaning, and depositing of low k and ultra-low k dielectrics for semiconductor technologies.
Date: March 15, 2012
Creator: Chen, Jin-Jian & Chyan, Oliver M. R.
Partner: UNT College of Arts and Sciences