Description: This invention is directed to a process of generating silicon tetrafluoride (SiF/sub 4/) from aqueous solutions of hexafluorosilicic acid (H/sub 2/SiF/sub 6/), comprising reacting an aqueous solution of H/sub 2/SiF/sub 6/ with a concentrated aqueous salt solution to produce a precipitate, separating and drying the precipitate, and heating the precipitate in an inert atmosphere to decompose the precipitate producing SiF/sub 4/.
Date: January 3, 1982
Creator: Hansen, K.C. & Yaws, C.L.
Partner: UNT Libraries Government Documents Department