Description: This paper describes an invention which relates to microtechnology and the fabrication process for developing microelectrical systems. It describes a means for fabricating a gas-driven microturbine capable of providing autonomous propulsion in which the rapidly moving gases are directed through a micromachined turbine to power devices by direct linkage or turbo-electric generators components in a domain ranging from tenths of micrometers to thousands of micrometers.
Date: June 27, 1996
Creator: Sniegowski, J.J.; Rodgers, M.S.; McWhorter, P.J.; Aeschliman, D.P. & Miller, W.M.
Partner: UNT Libraries Government Documents Department