Asymmetric injection of cathodic arc plasma into a macroparticlefilter
Description:
The cathodic arc plasmas produced by cathode spots usuallyinclude macroparticles, which is undesirable for many applications. Acommon way of removing macroparticles is to use curved solenoid filterswhich guide the plasma from the source to the substrate. In this work, anarc source with relatively small cathode is used, limiting the possiblelocations of plasma production. The relative position of cathodic arcsource and macroparticle filtered was systematically varied and thefiltered plasma curre…
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Date:
February 11, 2004
Creator:
Anders, Andre & MacGill, Robert A.
Item Type:
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