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Towards a Tribology Information System

Description: Abstract: A workshop was held in July 985 to address the needs for a computerized tribology information and data system, as well as possible implementation schemes. The meeting was sponsored by the American Society of Mechanical Engineers, Research Committee on Tribology, the Department of Energy, Energy Conservation and Utililation Technology Division, and the National Bureau of Standards. The views of a broad sector of industry, academia, and government were obtained over a four-week period through participation by about 60 individuals. Specific categories that were treated were design, numeric data, bibliography, research in progress, newsletter, and product directory. The principal discussion content and the recommendations in each subject category are summarized here. There was general agreement that a system of this type would be broadly useful to the engineering community for the purpose of design and materials selection, and for the research community as an important aid in information access and flow. The workshop recommendations detailed four phases of development, starting with a demonstration prototype system and concluding with a full-scale operating data and information base. Specific plans in each phase and for each subject area were developed and are presented here. While continual input will be sought from the technical community to refine those plans, it is hoped that immediate efforts can begin in at least some of the areas, and that system use will quickly develop to a significant level, both nationally and internationally.
Date: December 1987
Creator: Rumble, John R., Jr. & Sibley, Lewis
Partner: UNT Libraries Government Documents Department

Formation of Lubricating Films at Elevated Temperatures from the Gas Phase

Description: Abstract: Conventional liquid lubricants, when subjected to temperatures of 250*C and above for extended time in an air atmosphere, degrade rapidly to make large amounts of solid sludge and deposits. Based on boundary lubrication of bearings, these same lubricants, when subjected to 250*C to the melting point of the bearing metal, produce in the micro- to milli-second residence time in the bearing contact enough "friction polymer" to result in good lubrication. This report describes the use of these conventional liquid lubricants delivered in a homogeneous vapor phase where the carrier gas is nitrogen, air or mixtures of these two gases. The lubricants studied include alkyl and aryl phosphate esters, organic acid esters, polyphenyl ethers, and mineral oil.
Date: September 1988
Creator: Klaus, E. Erwin; Duda, J. L.; Naidu, S. K.; Munro, R. G. & Hsu, S. M.
Partner: UNT Libraries Government Documents Department

Silver Tantalate: a High Temperature Tribological Investigation

Description: As technology advances, mechanical and electrical systems are subjugated to intense temperature fluctuations through their service life. Designing coatings that operate in extreme temperatures is, therefore, a continuing challenge within the tribology community. Silver tantalate was chosen for investigation at the atomic level, the physical and chemical properties that influence the thermal, mechanical, and tribological behavior for moving assemblies in high temperature tribological applications. By correlating behavior of internal physical processes to the macro tribological behavior, the tribological community will potentially gain improved predicative performance of solid lubricants in future investigations. Three different approaches were explored for the creation of such materials on Inconel substrates: (1) powders produced using a solid state which were burnished on the surface; (2) monolithic silver tantalate thin films deposited by magnetron sputtering; and, (3) an adaptive tantalum nitride/silver nanocomposite sputter-deposited coating that forms a lubricious silver tantalate oxide on its surface when operated at elevated temperatures. Dry sliding wear tests of the coatings against Si3N4 counterfaces revealed friction coefficients in the 0.06 - 0.15 range at T ~ 750 °C. Reduced friction coefficients were found in nanocomposite materials that contained primarily a AgTaO3 phase with a small amount of segregated Ag phase, as suggested by structural characterization using X-ray diffraction. The presence of nanoparticles of segregated Ag in the thin films further enhanced the performance of these materials by increasing their toughness. Additional characterization of the AgTaO3 films at 750 °C under normal loads of 1, 2, 5, or 10 N revealed that the friction monotonically increased as the load was increased. These results were complemented by molecular dynamics simulations, which confirmed the increase of friction with load. Further, the simulations support the hypothesis that this trend can be explained in terms of decreased presence of Ag clusters near the sliding surface and the ...
Date: December 2014
Creator: Stone, D’Arcy S.
Partner: UNT Libraries


Description: The incorporation of silver into the diamond-like carbon (DLC) coatings has shown excellent potential in various applications; therefore the surface and tribological properties of silver-containing DLC thin films deserve to be investigated. In this study we have deposited silver-containing hydrogenated and hydrogen-free DLC coatings by plasma immersion ion implantation and deposition (PIII-D) methods. Atomic force microscopy (AFM) and nano-scratch tests were used to study the surface and tribological properties. The silver incorporation had only slight effects on hydrogenated DLC coatings. However, the incorporation of silver has significant effect on hydrogen-free DLC of smoothing the surface and increasing the surface energy. Those effects have been illustrated and explained in the context of experimental results.
Date: June 12, 2008
Creator: Zhang, Hanshen S.; Endrino, Jose L. & Anders, Andre
Partner: UNT Libraries Government Documents Department

Sliding Friction and Wear Behavior of High Entropy Alloys at Room and Elevated Temperatures

Description: Structure-tribological property relations have been studied for five high entropy alloys (HEAs). Microhardness, room and elevated (100°C and 300°C) temperature sliding friction coefficients and wear rates were determined for five HEAs: Co0.5 Cr Cu0.5 Fe Ni1.5 Al Ti0.4; Co Cr Fe Ni Al0.25 Ti0.75; Ti V Nb Cr Al; Al0.3CoCrFeNi; and Al0.3CuCrFeNi2. Wear surfaces were characterized with scanning electron microscopy and micro-Raman spectroscopy to determine the wear mechanisms and tribochemical phases, respectively. It was determined that the two HEAs Co0.5 Cr Cu0.5 Fe Ni1.5 Al Ti0.4 and Ti V Nb Cr Al exhibit an excellent balance of high hardness, low friction coefficients and wear rates compared to 440C stainless steel, a currently used bearing steel. This was attributed to their more ductile body centered cubic (BCC) solid solution phase along with the formation of tribochemical Cr oxide and Nb oxide phases, respectively, in the wear surfaces. This study provides guidelines for fabricating novel, low-friction, and wear-resistant HEAs for potential use at room and elevated temperatures, which will help reduce energy and material losses in friction and wear applications.
Date: December 2016
Creator: Kadhim, Dheyaa
Partner: UNT Libraries

Frictional behavior of automotive brake materials under wet and dry conditions

Description: The purpose of this effort was to develop an improved understanding of the relationship between the structure and frictional behavior of materials in the disc brake/rotor interface with a view toward improving the performance of automotive disc brakes. The three tasks involved in this Cooperative Research and Development Agreement (CRADA) were as follows: Task 1. Investigation of Brake Pads and Rotors. Characterize surface features of worn brake pads and rotors, with special attention to the transfer film which forms on them during operation. Ford to supply specimens for examination and other supporting information. Task 2. Effects of Atmosphere and Repeated Applications on Brake Material Friction. Conduct pin-on-disk friction tests at ORNL under controlled moisture levels to determine effects of relative humidity on frictional behavior of brake pad and rotor materials. Conduct limited tests on the characteristics of friction under application of repeated contacts. Task 3. Comparison of Dynamometer Tests with Laboratory Friction Tests. Compare ORNL friction data with Ford dynamometer test data to establish the degree to which the simple bench tests can be useful in helping to understand frictional behavior in full-scale brake component tests. This final report summarizes work performed under this CRADA.
Date: December 15, 1996
Creator: Blau, P.J.; Martin, R.L.; Weintraub, M.H.; Jang, Ho & Donlon, W.
Partner: UNT Libraries Government Documents Department

Meso-scale machining capabilities and issues

Description: Meso-scale manufacturing processes are bridging the gap between silicon-based MEMS processes and conventional miniature machining. These processes can fabricate two and three-dimensional parts having micron size features in traditional materials such as stainless steels, rare earth magnets, ceramics, and glass. Meso-scale processes that are currently available include, focused ion beam sputtering, micro-milling, micro-turning, excimer laser ablation, femto-second laser ablation, and micro electro discharge machining. These meso-scale processes employ subtractive machining technologies (i.e., material removal), unlike LIGA, which is an additive meso-scale process. Meso-scale processes have different material capabilities and machining performance specifications. Machining performance specifications of interest include minimum feature size, feature tolerance, feature location accuracy, surface finish, and material removal rate. Sandia National Laboratories is developing meso-scale electro-mechanical components, which require meso-scale parts that move relative to one another. The meso-scale parts fabricated by subtractive meso-scale manufacturing processes have unique tribology issues because of the variety of materials and the surface conditions produced by the different meso-scale manufacturing processes.
Date: May 15, 2000
Partner: UNT Libraries Government Documents Department

Definition of Brittleness: Connections Between Mechanical and Tribological Properties of Polymers.

Description: The increasing use of polymer-based materials (PBMs) across all types of industry has not been matched by sufficient improvements in understanding of polymer tribology: friction, wear, and lubrication. Further, viscoelasticity of PBMs complicates characterization of their behavior. Using data from micro-scratch testing, it was determined that viscoelastic recovery (healing) in sliding wear is independent of the indenter force within a defined range of load values. Strain hardening in sliding wear was observed for all materials-including polymers and composites with a wide variety of chemical structures-with the exception of polystyrene (PS). The healing in sliding wear was connected to free volume in polymers by using pressure-volume-temperature (P-V-T) results and the Hartmann equation of state. A linear relationship was found for all polymers studied with again the exception of PS. The exceptional behavior of PS has been attributed qualitatively to brittleness. In pursuit of a precise description of such, a quantitative definition of brittleness has been defined in terms of the elongation at break and storage modulus-a combination of parameters derived from both static and dynamic mechanical testing. Furthermore, a relationship between sliding wear recovery and brittleness for all PBMs including PS is demonstrated. The definition of brittleness may be used as a design criterion in selecting PBMs for specific applications, while the connection to free volume improves also predictability of wear behavior.
Date: August 2008
Creator: Hagg Lobland, Haley E.
Partner: UNT Libraries

Characterization of transfer layers on steel surfaces sliding against diamondlike carbon in dry nitrogen

Description: Transfer layers on sliding steel surfaces play important roles in tribological performance of diamondlike carbon films. This study investigated the nature of transfer layers formed on M50 balls during sliding against diamondlike carbon (DLC) films (1.5 {mu}m thick) prepared by ion-beam deposition. Long-duration sliding tests were performed with steel balls sliding against the DLC coatings in dry nitrogen at room temperature and zero humidity. Test results indicated that the friction coefficients of test pairs were initially 0.12 but decreased steadily with sliding distance to 0.02-0.03 and remained constant throughout the tests, which lasted for more than 250,000 sliding cycles (30 km). This low-friction regime appeared to coincide with the formation of a carbon-rich transfer layer on the sliding surfaces of M50 balls. Micro-laser-Raman spectroscopy and electron microscopy were used to elucidate the structure and chemistry of these transfer layers and to reveal their possible role in the wear and friction behavior of DLC-coated surfaces.
Date: March 1, 1995
Creator: Erdemir, A.; Bindal, C.; Pagan, J. & Wilbur, P.
Partner: UNT Libraries Government Documents Department

Ternary Oxide Structures for High Temperature Lubrication

Description: In this research, a temperature dependent tribological investigation of selected ternary oxides was undertaken. Based on the promising results of previous studies on silver based ternary oxides, copper based ternary oxides were selected to conduct a comparative study since both copper and silver are located in the same group in the periodic table of the elements. Two methods were used to create ternary oxides: (i) solid chemical synthesis to create powders and (ii) sputtering to produce thin films. X-ray diffraction was used to explore the evolution of phases, chemical properties, and structural properties of the coatings before and after tribotesting. Scanning electron microscopy, Auger scanning nanoprobe spectroscopy, and X-ray photoelectron spectroscopy were used to investigate the chemical and morphological properties of these materials after sliding tests. These techniques revealed that chameleon coatings of copper ternary oxides produce a friction coefficient of 0.23 when wear tested at 430 °C. The low friction is due to the formation of copper tantalate phase and copper in the coatings. All sputtering coatings showed similar tribological properties up to 430 °C.
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Date: August 2015
Creator: Gu, Jingjing
Partner: UNT Libraries

Mechanics and tribology of MEMS materials.

Description: Micromachines have the potential to significantly impact future weapon component designs as well as other defense, industrial, and consumer product applications. For both electroplated (LIGA) and surface micromachined (SMM) structural elements, the influence of processing on structure, and the resultant effects on material properties are not well understood. The behavior of dynamic interfaces in present as-fabricated microsystem materials is inadequate for most applications and the fundamental relationships between processing conditions and tribological behavior in these systems are not clearly defined. We intend to develop a basic understanding of deformation, fracture, and surface interactions responsible for friction and wear of microelectromechanical system (MEMS) materials. This will enable needed design flexibility for these devices, as well as strengthen our understanding of material behavior at the nanoscale. The goal of this project is to develop new capabilities for sub-microscale mechanical and tribological measurements, and to exercise these capabilities to investigate material behavior at this size scale.
Date: April 1, 2004
Creator: Prasad, Somuri V.; Dugger, Michael Thomas; Boyce, Brad Lee & Buchheit, Thomas Edward
Partner: UNT Libraries Government Documents Department

LDRD Project 52523 final report :Atomic layer deposition of highly conformal tribological coatings.

Description: Friction and wear are major concerns in the performance and reliability of micromechanical (MEMS) devices. While a variety of lubricant and wear resistant coatings are known which we might consider for application to MEMS devices, the severe geometric constraints of many micromechanical systems (high aspect ratios, shadowed surfaces) make most deposition methods for friction and wear-resistance coatings impossible. In this program we have produced and evaluate highly conformal, tribological coatings, deposited by atomic layer deposition (ALD), for use on surface micromachined (SMM) and LIGA structures. ALD is a chemical vapor deposition process using sequential exposure of reagents and self-limiting surface chemistry, saturating at a maximum of one monolayer per exposure cycle. The self-limiting chemistry results in conformal coating of high aspect ratio structures, with monolayer precision. ALD of a wide variety of materials is possible, but there have been no studies of structural, mechanical, and tribological properties of these films. We have developed processes for depositing thin (<100 nm) conformal coatings of selected hard and lubricious films (Al2O3, ZnO, WS2, W, and W/Al{sub 2}O{sub 3} nanolaminates), and measured their chemical, physical, mechanical and tribological properties. A significant challenge in this program was to develop instrumentation and quantitative test procedures, which did not exist, for friction, wear, film/substrate adhesion, elastic properties, stress, etc., of extremely thin films and nanolaminates. New scanning probe and nanoindentation techniques have been employed along with detailed mechanics-based models to evaluate these properties at small loads characteristic of microsystem operation. We emphasize deposition processes and fundamental properties of ALD materials, however we have also evaluated applications and film performance for model SMM and LIGA devices.
Date: October 1, 2005
Creator: Jungk, John Michael (University of Minnesota); Dugger, Michael Thomas; George, Steve M. (University of Colorado); Prasad, Somuri V.; Grubbs, Robert K.; Moody, Neville Reid et al.
Partner: UNT Libraries Government Documents Department

Investigation of non-hydrogenated DLC:Si prepared by cathodic arc[Diamond-Like Carbon]

Description: Non-hydrogenated DLC films (also referred as ta-C) have been extensively studied and are used for a variety of wear related applications. Alloying DLC with refractory metals and other elements have been shown to be promising techniques to overcome some of the problems associated with pure DLC, such as excessive level of intrinsic stresses and high-temperature stability. The microstructure of DLC:Me in general consists of crystalline metal carbides dispersed in a DLC matrix. In contrary, DLC:Si has an amorphous structure. We have used filtered cathodic arc to prepare DLC:Si up to 6 percent Si, and have characterized their structure and bonding using microscopy (TEM) and spectroscopy (XPS, NEXAFS). The effect of Si in changing the bonding configuration of the C network is discussed. The microstructure is then correlated to hardness and friction measured by nano-indentation and micro-wear.
Date: March 18, 2002
Creator: Monteiro, Othon R. & Delplancke-Ogletree, Marie-Paule
Partner: UNT Libraries Government Documents Department

Stable Nanocrystalline Au Film Structures for Sliding Electrical Contacts

Description: Hard gold thin films and coatings are widely used in electronics as an effective material to reduce the friction and wear of relatively less expensive electrically conductive materials while simultaneously seeking to provide oxidation resistance and stable sliding electrical contact resistance (ECR). The main focus of this dissertation was to synthesize nanocrystalline Au films with grain structures capable of remaining stable during thermal exposure and under sliding electrical contact stress and the passing of electrical current. Here we have utilized a physical vapor deposition (PVD) technique, electron beam evaporation, to synthesize Au films modified by ion implantation and codeposited ZnO hardened Au nanocomposites. Simultaneous friction and ECR experiments of low fluence (< 1x10^17 cm^-2) He and Ar ion implanted Au films showed reduction in friction coefficients from ~1.5 to ~0.5 and specific wear rates from ~4x10^-3 to ~6x10^-5 mm^3/N·m versus as-deposited Au films without significant change in sliding ECR (~16 mΩ). Subsurface microstructural changes of He implanted films due to tribological stress were analyzed via site-specific cross-sectional transmission electron microscopy (TEM) and revealed the formation of nanocrystalline grains for low energy (22.5 keV) implantation conditions as well as the growth and redistribution of cavities. Nanoindentation hardness results revealed an increase from 0.84 GPa for as-deposited Au to ~1.77 GPa for Au uniformly implanted with 1 at% He. These strength increases are correlated with an Orowan hardening mechanism that increases proportionally to (He concentration)1/3. Au-ZnO nanocomposite films in the oxide dilute regime (< 5 vol% ZnO) were investigated for low temperature aging stability in friction and ECR. Annealing at 250 °C for 24 hours Au-(2 vol%)ZnO retained a friction coefficient comparable to commercial Ni hardened Au of ~ 0.3 and sliding ECR values of ~35 mΩ. Nanoindentation hardness increases of these films (~2.6 GPa for 5 vol% ZnO) are correlated to ...
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Date: May 2016
Creator: Mogonye, Jon-Erik
Partner: UNT Libraries


Description: A reduction of vibrations in mechanical seals increases the life of the seals in centrifugal pumps by minimizing fatigue damage. Mechanical seals consist of two smooth seal faces. one face is stationary with respect to the pump. The other rotates. Between the faces a fluid film evaporates as the fluid moves radially outward across the seal face. ideally, the film evaporates as it reaches the outer surface of the seal faces, thereby preventing leakage from the pump and effectively lubricating the two surfaces. Relative vibrations between the two surfaces affect the fluid film and lead to stresses on the seal faces, which lead to fatigue damage. As the fluid film breaks down impacts between the two seal faces create tensile stresses on the faces, which cycle at the speed of the motor rotation. These cyclic stresses provide the mechanism leading to fatigue crack growth. The magnitude of the stress is directly related to the rate of crack growth and time to failure of a seal. Related to the stress magnitude, vibration data is related to the life of mechanical seals in pumps.
Date: April 30, 2007
Creator: Leishear, R; Jerald Newton, J & David Stefanko, D
Partner: UNT Libraries Government Documents Department

FLASHFOAM : a triboluminescent polymer foam for mechanical sensing.

Description: The formulation and processing of a brittle polyurethane foam containing triboluminescent powder additives is described. Two powder additives, known to exhibit triboluminescence, were individually examined: triethylammonium tetrakis (dibenzoylmethanato) europate [NEt3H][Eu(DBM)4] and ordinary table sugar (sucrose, C12H22O11). In each instance, the powders were mixed into the polyol component of the foam. When combined with the isocyanate component, the resulting foams had these powders incorporated into their cellular structure so as to induce a triboluminescent response upon crushing during impact testing. The triboluminescent response of foam specimens containing each of these powder additives was characterized by measuring: the time rate of change in the optical output (measured as Watts), the peak optical output, the total integrated output (Watt-seconds), during the impact event. Foams containing the europate compound were found to yield several orders of magnitude higher output when compared to the sugar-containing foam. Strain rate and concentration of the powder (in the foam) were important variables with respect to optical output. Both the peak and total triboluminescent output increased with increasing powder concentration. Peak output was also found to increase with increasing strain rate. However, the total output was found to be roughly constant for a given concentration regardless of strain rate (over the strain rate range: 20 sec-1&lt; e& &lt; 150 sec-1). At very low strain rates, no triboluminescent response was measured.
Date: July 1, 2003
Creator: Dentinger, Paul M.; Whinnery, LeRoy L., Jr. & Goods, Steven Howard
Partner: UNT Libraries Government Documents Department

Scratch Forensics

Description: Scratches on optical components which are formed during fabrication, cleaning, handling and end-use, are widespread and almost always detrimental. The impact of scratches on the end-use of the optic includes increased optical scatter, reduced system performance, and reduced strength. In the case of optics used in high intensity laser applications, prevention of scratches is paramount because they are closely associated with laser damage. Evaluation of the characteristics (dimensions, location on optic, shape, and orientation) of a scratch can serve a powerful tool to identify the cause of the scratch and lead to mitigations to prevent their reoccurrence. It is likely that opticians have used such techniques for hundreds of years. In recent years, by applying techniques of fracture mechanics and tribology, several new semi-quantitative rules-of-thumb have been developed allowing one to estimate the size and shape of the scratch inducing asperity or rogue particle, the load on the particle, the depth of the fractures in the scratch, and properties of material housing the rogue particle. The following discussion reviews some these techniques, which as a whole, we refer to as 'Scratch Forsenics'.
Date: July 9, 2008
Creator: Suratwala, T I; Miller, P E; Feit, M D & Menapace, J A
Partner: UNT Libraries Government Documents Department

Modified epoxy coatings on mild steel: A study of tribology and surface energy.

Description: A commercial epoxy was modified by adding fluorinated poly (aryl ether ketone) and in turn metal micro powders (Ni, Al, Zn, and Ag) and coated on mild steel. Two curing agents were used; triethylenetetramine (curing temperatures: 30 oC and 70 oC) and hexamethylenediamine (curing temperature: 80 oC). Variation in tribological properties (dynamic friction and wear) and surface energies with varying metal powders and curing agents was evaluated. When cured at 30 oC, friction and wear decreased significantly due to phase separation reaction being favored but increased when cured at 70 oC and 80 oC due to cross linking reaction being favored. There was a significant decrease in surface energies with the addition of modifiers.
Date: August 2009
Creator: Dutta, Madhuri
Partner: UNT Libraries

Tribological Characteristics of sputtered Au/Cr films on alumina substrates at elevated temperatures

Description: This paper describes research to evaluate the tribological properties of alumina pins sliding against thin sputtered gold films deposited on alumina disk substrates. A 250 {angstrom} thick chromium interlayer was first deposited onto the alumina test disks to enhance adhesion and high temperature wetting of the gold films. The Au/Cr films were tribotested in pure sliding in a pin-on-disk tribometer under a 4.9 N load at 1 m/s. The test atmosphere was room air at temperatures of 25, 500, and 800 C and the test duration varied from 60 to 540 min. The use of the Au/Cr films reduced friction by about a factor of two compared to the unlubricated alumina sliding couple. The coating prevented wear of the alumina substrate disks and reduced pin wear by one to two orders of magnitude. In addition, wear lives in excess of 200 000 sliding passes (9 hr) were observed during sliding at 800 C. Results suggest that these films show promise for the practical lubrication of many high temperature sliding components.
Date: December 31, 1993
Creator: Benoy, P.A. & DellaCorte, C.
Partner: UNT Libraries Government Documents Department

ARTI refrigerant database

Description: The Refrigerant Database is an information system on alternative refrigerants, associated lubricants, and their use in air conditioning and refrigeration. It consolidates and facilitates access to property, compatibility, environmental, safety, application and other information. It provides corresponding information on older refrigerants, to assist manufacturers and those using alterative refrigerants, to make comparisons and determine differences. The underlying purpose is to accelerate phase out of chemical compounds of environmental concern. The database provides bibliographic citations and abstracts for publications that may be useful in research and design of air-conditioning and refrigeration equipment. The complete documents are not included, though some may be added at a later date. The database identifies sources of specific information on various refrigerants. It addresses lubricants including alkylbenzene, polyalkylene glycol, polyolester, and other synthetics as well as mineral oils. It also references documents addressing compatibility of refrigerants and lubricants with metals, plastics, elastomers, motor insulation, and other materials used in refrigerant circuits. Incomplete citations or abstracts are provided for some documents. They are included to accelerate availability of the information and will be completed or replaced in future updates.
Date: February 1, 1997
Creator: Calm, J.M.
Partner: UNT Libraries Government Documents Department

Diamond films grown from fullerene precursors

Description: Fullerene precursors have been shown to result in the growth of diamond films from argon microwave plasmas. In contradistinction to most diamond films grown using conventional methane-hydrogen mixtures, the fullerene-generated films are nanocrystalline and smooth on the nanometer scale. They have recently been shown to have friction coefficients approaching the values of natural diamond. It is clearly important to understand the development of surface morphology during film growth from fullerene precursors and to elucidate the factors leading to surface roughness when hydrogen is present in the chemical vapor deposition (CVD) gas mixtures. To achieve these goals, we are measuring surface reflectivity of diamond films growing on silicon substrates over a wide range of plasma processing conditions. A model for the interpretation of the laser interferometric data has been developed, which allows one to determine film growth rate, rms surface roughness, and bulk losses due to scattering and absorption. The rms roughness values determined by reflectivity are in good agreement with atomic force microscope (AFM) measurements. A number of techniques, including high-resolution transmission electron microscopy (HRTEM) and near-edge x-ray absorption find structure (NEXAFS) measurements, have been used to characterize the films. A mechanism for diamond-film growth involving the C{sub 2} molecule as a growth species will be presented. The mechanism is based on (1) the observation that the optical emission spectra of the fullerene- containing plasmas are dominated by the Swan bands of C{sub 2} and (2) the ability of C{sub 2} to insert directly into C-H and C-C bonds with low activation barriers, as shown by recent theoretical calculations of reactions of C{sub 2} with carbon clusters.
Date: July 1, 1995
Creator: Gruen, D.M.; Zuiker, C.D. & Krauss, A.R.
Partner: UNT Libraries Government Documents Department