High power impulse magnetron sputtering: Current-voltage-timecharacteristics indicate the onset of sustained self-sputtering
Description:
The commonly used current-voltage characteristics are foundinadequate for describing the pulsed nature of the high power impulsemagnetron sputtering (HIPIMS) discharge, rather, the description needs tobe expanded to current-voltage-time characteristics for each initial gaspressure. Using different target materials (Cu, Ti, Nb, C, W, Al, Cr) anda pulsed constant-voltage supply it is shown that the HIPIMS dischargestypically exhibit an initial pressure dependent current peak followed bya second p…
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Date:
August 3, 2007
Creator:
Anders, Andre; Andersson, Joakim & Ehiasarian, Arutiun
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