Plasma Biasing to Control the Growth Conditions of Diamond-Like Carbon
Description:
It is well known that the structure and properties ofdiamond-like carbon, and in particular the sp3/sp2 ratio, can becontrolled by the energy of the condensing carbon ions or atoms. In manypractical cases, the energy of ions arriving at the surface of thegrowing film is determined by the bias applied to the substrate. The biascauses a sheath to form between substrate and plasma in which thepotential difference between plasma potential and surface potentialdrops. In this contribution, we demonst…
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Date:
April 30, 2006
Creator:
Anders, Andre; Pasaja, Nitisak; Lim, Sunnie H.N.; Petersen, TimC. & Keast, Vicki J.
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UNT Libraries Government Documents Department