Description: This paper presents a new method for wideband force balancing a proof-mass in multiple axes simultaneously. Capacitive position sense and force feedback are accomplished using the same air-gap capacitors through time multiplexing. Proof of concept is experimentally demonstrated with a single-mass monolithic surface micromachined 3-axis accelerometer.
Date: April 1997
Creator: Lemkin, M.A.; Boser, B.E.; Auslander, D. & Smith, J.
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