Description: Failure analysis is a critical element in the integrated circuit manufacturing industry. This paper reviews the changing role of failure analysis and describes major techniques employed in the industry today. Several advanced failure analysis techniques that meet the challenges imposed by advancements in integrated circuit technology are described and their applications are discussed. Future trends in failure analysis needed to keep pace with the continuing advancements in integrated circuit technology are anticipated.
Date: February 1, 1995
Creator: Anderson, R. E.; Soden, J. M. & Henderson, C. L.
Item Type: Refine your search to only Article
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