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Some measurements of atmosphere turbulence obtained from flow-direction vanes mounted on an airplane

Description: Report presenting a calculation of the power spectrum of relatively short wavelength turbulence in the atmosphere using measurements made in flight. The power spectral density varies with the square of the wavelength of the turbulence. Results regarding the power spectrum of gust vertical velocity, problems related to gust disturbance determination, and use of flow-direction vanes are provided.
Date: November 1954
Creator: Chilton, Robert G.
Partner: UNT Libraries Government Documents Department

Experimental and model-based study of the robustness of line-edgeroughness metric extraction in the presence of noise

Description: As critical dimensions shrink, line edge and width roughness (LER and LWR) become of increasing concern. Crucial to the goal of reducing LER is its accurate characterization. LER has traditionally been represented as a single rms value. More recently the use of power spectral density (PSD), height-height correlation (HHCF), and {sigma} versus length plots has been proposed in order to extract the additional spatial descriptors of correlation length and roughness exponent. Here we perform a modeling-based noise-sensitivity study on the extraction of spatial descriptors from line-edge data as well as an experimental study of the robustness of these various descriptors using a large dataset of recent extreme-ultraviolet exposure data. The results show that in the presence of noise and in the large dataset limit, the PSD method provides higher accuracy in the extraction of the roughness exponent, whereas the HHCF method provides higher accuracy for the correlation length. On the other hand, when considering precision, the HHCF method is superior for both metrics.
Date: June 1, 2007
Creator: Naulleau, Patrick P. & Cain, Jason P.
Partner: UNT Libraries Government Documents Department

The effect of resist on the transfer of line-edge roughness spatial metrics from mask to wafer

Description: Mask contributors to line-edge roughness (LER) have recently been shown to be an issue of concern for both the accuracy of current resist evaluation tests as well the ultimate LER requirements for the 22-nm production node. More recently, it has been shown that the power spectral density of the mask-induced roughness, is markedly different than that of intrinsic resist roughness and thus potentially serves as a mechanism for distinguishing mask effects from resist effects in experimental results. Further considering stochastic resist effects, however, demonstrates that such a test would only be viable in cases where the resist effects are completely negligible in terms of their contribution to the total LER compared to the mask effects. The results presented here lead us to the surprising conclusion that it is indeed possible for mask contributors to be the dominant source of LER while the spatial characteristics of the LER remain indistinguishable from the fractal characteristics of resist-induced LER.
Date: May 1, 2009
Creator: Naulleau, Patrick & Gallatin, Gregg
Partner: UNT Libraries Government Documents Department

Differential spectral synthesis with a library of elliptical galaxies

Description: Spectrophotometry of elliptical galaxies spanning a large rang in luminosity is analyzed for cosmic variations in color and line strength. The results are used to construct a base sequence spectral energy distribution as a function line strength, color, and velocity dispersion, representing old, red, uniform elliptical galaxy stellar populations. The sequence can be used as the starting point for investigating and modeling the stellar populations of other systems such as dwarf ellipticals, merger remnants, and, eventually, high redshift ellipticals.
Date: December 7, 1995
Creator: Gregg, M.
Partner: UNT Libraries Government Documents Department

Cross-check of different techniques for two-dimensional powerspectral density measurements of X-ray optics

Description: The consistency of different instruments and methods for measuring two-dimensional (2D) power spectral density (PSD) distributions are investigated. The instruments are an interferometric microscope, an atomic force microscope (AFM) and the X-ray Reflectivity and Scattering experimental facility, all available at Lawrence Berkeley National Laboratory. The measurements were performed with a gold-coated mirror with a highly polished stainless steel substrate. It was shown that these three techniques provide essentially consistent results. For the stainless steel mirror, an envelope over all measured PSD distributions can be described with an inverse power-law PSD function. It is also shown that the measurements can be corrected for the specific spatial frequency dependent systematic errors of the instruments. The AFM and the X-ray scattering measurements were used to determine the modulation transfer function of the interferometric microscope. The corresponding correction procedure is discussed in detail. Lower frequency investigation of the 2D PSD distribution was also performed with a long trace profiler and a ZYGO GPI interferometer. These measurements are in some contradiction, suggesting that the reliability of the measurements has to be confirmed with additional investigation. Based on the crosscheck of the performance of all used methods, we discuss the ways for improving the 2D PSD characterization of X-ray optics.
Date: April 17, 2005
Creator: Yashchuk, Valeriy V.; Irick, Steve C.; Gullikson, Eric M.; Howells, Malcolm R.; MacDowell, Alastair A.; McKinney, Wayne R. et al.
Partner: UNT Libraries Government Documents Department

Geotech Smart24 data acquisition system input terminated noise seismic response adjusted test : StreckeisenSTS2-low and high gain, Guralp CMG3T and Geotech GS13 seismometers.

Description: Sandia National Laboratories has tested, evaluated and reported on the Geotech Smart24 data acquisition system with active Fortezza crypto card data signing and authentication in SAND2008-. One test, Input Terminated Noise, allows us to characterize the self-noise of the Smart24 system. By computing the power spectral density (PSD) of the input terminated noise time series data set and correcting for the instrument response of different seismometers, the resulting spectrum can be compared to the USGS new low noise model (NLNM) of Peterson (1996), and determine the ability of the matched system of seismometer and Smart24 to be quiet enough for any general deployment location. Four seismometer models were evaluated: the Streckeisen STS2-Low and High Gain, Guralp CMG3T and Geotech GS13 models. Each has a unique pass-band as defined by the frequency band of the instrument corrected noise spectrum that falls below the new low-noise model.
Date: August 1, 2008
Creator: Rembold, Randy Kai; Hart, Darren M. & Harris, James Mark
Partner: UNT Libraries Government Documents Department

Fluctuations of the van der Waals attraction force between macroscopic bodies

Description: The tliccry of the fluctuations of the van der Waals (vdW) attractive force between macroscopic bodies is developed. A general equation for the spectral density of the fluctuating surface Maxwell stress (force per unit mea.) in va,cuurn nea,r the surface of a body is derived under the assumption that, inside the bodies, the random La.ngevin sources of the electric and magnetic fields (charges, polarizations, currents) are Gaussian. This spectral density of stress is an integral over frequencies of a sum of terms each of which is a product of Fourier amplitudes of two field components' correlation functions. For metallic bodies, the contribution of free electrons to the vdW force (at frequencies up to the frequency of electron scattering) is calculated. This contribution to the force and its noise grows with temperature. Application of noiseless voltage to two interacting metals across the vacuum gap between them generates an additional force noise. This additional noise is proportional to the volta.ge squared and to the spectral density of the random electric field at the frequency of noise measurement. The theoretical qualitative conclusions are in good agreement with experirncnts.
Date: January 1, 2003
Creator: Kogan, A. S. (Aleksandr Semenovich)
Partner: UNT Libraries Government Documents Department

AIR CONVECTION NOISE OF PENCIL-BEAM INTERFERMETER FOR LONG TRACE PROFILER.

Description: In this work, we investigate the effect of air convection on laser-beam pointing noise essential for the long trace profiler (LTP). We describe this pointing error with noise power density (NPD) frequency distributions. It is shown that the NPD spectra due to air convection have a very characteristic form. In the range of frequencies from {approx}0.05 Hz to {approx}0.5 Hz, the spectra can be modeled with an inverse-power-law function. Depending on the intensity of air convection that is controlled with a resistive heater of 100 to 150 mW along a one-meter-long optical path, the power index lies between 2 and 3 at an overall rms noise of {approx}0.5 to 1 microradian. The efficiency of suppression of the convection noise by blowing air across the beam optical path is also discussed. Air-blowing leads to a white-noise-like spectrum. Air blowing was applied to the reference channel of an LTP allowing demonstration of the contribution of air convection noise to the LTP reference beam. The ability to change (with the blowing technique presented) the spectral characteristics of the beam pointing noise due to air convection allows one to investigate the contribution of the convection effect, and thus make corrections to the power spectral density spectra measured with the LTP.
Date: August 14, 2006
Creator: YASHCHUK, V.V.; IRICK, S.C.; MACDOWELL, A.A.; MCKINNEY, W.R. & TAKACS, P.Z.
Partner: UNT Libraries Government Documents Department

Stability of modulation transfer function calibration of surface profilometers using binary pseudo-random gratings and arrays with nonideal groove shapes

Description: The major problem of measurement of a power spectral density (PSD) distribution of surface heights with surface profilometers arises due to the unknown Modulation Transfer Function (MTF) of the instruments, which tends to distort the PSD at higher spatial frequencies. The special mathematical properties of binary pseudo-random patterns make them an ideal basis for developing MTF calibration test surfaces. Two-dimensional binary pseudo-random arrays (BPRAs) have been fabricated and used for the MTF calibration of the MicroMap{trademark}-570 interferometric microscope with all available objectives. An investigation into the effects of fabrication imperfections on the quality of the MTF calibration and a procedure for accounting for such imperfections are presented.
Date: March 31, 2010
Creator: Barber, Samuel K.; Anderson, Erik H.; Cambie, Rossana; Marchesini, Stefano; McKinney, Wayne R.; Takacs, Peter Z. et al.
Partner: UNT Libraries Government Documents Department

Spatial scaling metrics of mask-induced induced line-edge roughness

Description: Mask contributors to line-edge roughness (LER) have recently been shown to be an issue of concern for both the accuracy of current resist evaluation tests as well the ultimate LER requirements for the 22-nm production node. Problems arise from mask absorber LER as well as mask reflector or surface roughness leading to random phase variations in the reflected beam. Not only do these mask contributors effect to total measured LER in resist, but they also effect LER spatial characteristic such as the LER power spectral density and related descriptors of correlation length and roughness exponent. Noting that these characteristics are important in the understanding of LER, it is crucial to understand how mask effects impact these parameters. Moreover, understanding how these metrics respond to mask effects may lead to an experimental mechanism for experimentally evaluating the importance of mask contributors to LER. Here we use computer modeling to study the LER spatial metrics arising from mask effects. We further describe the effects of illumination conditions and defocus on the metrics and compare the results to those expected from intrinsic resist LER.
Date: September 5, 2008
Creator: Naulleau, Patrick P. & Gallatin, Gregg
Partner: UNT Libraries Government Documents Department

Generation of time histories with a specified auto spectral density and probability density function

Description: It is recognized that some dynamic and noise environments are characterized by time histories which are not Gaussian. An example is high intensity acoustic noise. Another example is some transportation vibration. A better simulation of these environments can be generated if a zero mean non-Gaussian time history can be reproduced with a specified auto (or power) spectral density (ASD or PSD) and a specified probability density function (pdf). After the required time history is synthesized, the waveform can be used for simulation purposes. For example, modem waveform reproduction techniques can be used to reproduce the waveform on electrodynamic or electrohydraulic shakers. Or the waveforms can be used in digital simulations. A method is presented for the generation of realizations of zero mean non-Gaussian random time histories with a specified ASD, and pdf. First a Gaussian time history with the specified auto (or power) spectral density (ASD) is generated. A monotonic nonlinear function relating the Gaussian waveform to the desired realization is then established based on the Cumulative Distribution Function (CDF) of the desired waveform and the known CDF of a Gaussian waveform. The established function is used to transform the Gaussian waveform to a realization of the desired waveform. Since the transformation preserves the zero-crossings and peaks of the original Gaussian waveform, and does not introduce any substantial discontinuities, the ASD is not substantially changed. Several methods are available to generate a realization of a Gaussian distributed waveform with a known ASD. The method of Smallwood and Paez (1993) is an example. However, the generation of random noise with a specified ASD but with a non-Gaussian distribution is less well known.
Date: August 1, 1996
Creator: Smallwood, D.O.
Partner: UNT Libraries Government Documents Department

Determination of the multiplication factor and its bias by the {sup 252}Cf-source technique: A method for code benchmarking with subcritical configurations

Description: A brief discussion of the Cf-252 source driven method for subcritical measurements serves as an introduction to the concept and use of the spectral ratio, {Gamma}. It has also been shown that the Monte Carlo calculation of spectral densities and effective multiplication factors have as a common denominator the transport propagator. This commonality follows from the fact that the Neumann series expansion of the propagator lends itself to the Monte Carlo method. On this basis a linear relationship between the spectral ratio and the effective multiplication factor has been shown. This relationship demonstrates the ability of subcritical measurements of the ratio of spectral densities to validate transport theory methods and cross sections.
Date: August 1, 1997
Creator: Perez, R.B.; Valentine, T.E.; Mihalczo, J.T. & Mattingly, J.K.
Partner: UNT Libraries Government Documents Department

Binary Pseudo-Random Gratings and Arrays for Calibration of Modulation Transfer Function of Surface Profilometers

Description: In the present work, we describe application of binary pseudo-random gratings (BPRG) and arrays (BPRA) as effective 1D and 2D test surfaces suitable for calibration of different surface profilometers, including a number of interferometric microscopes and scatterometers.
Date: June 17, 2009
Creator: Barber, Samuel K.; Anderson, Erik D.; Cambie, Rossana; McKinney, Wayne R.; Takacs, Peter Z.; Stover, John C. et al.
Partner: UNT Libraries Government Documents Department

Characterization of electron microscopes with binary pseudo-random multilayer test samples

Description: We discuss the results of SEM and TEM measurements with the BPRML test samples fabricated from a BPRML (WSi2/Si with fundamental layer thickness of 3 nm) with a Dual Beam FIB (focused ion beam)/SEM technique. In particular, we demonstrate that significant information about the metrological reliability of the TEM measurements can be extracted even when the fundamental frequency of the BPRML sample is smaller than the Nyquist frequency of the measurements. The measurements demonstrate a number of problems related to the interpretation of the SEM and TEM data. Note that similar BPRML test samples can be used to characterize x-ray microscopes. Corresponding work with x-ray microscopes is in progress.
Date: July 9, 2010
Creator: Yashchuk, Valeriy V; Conley, Raymond; Anderson, Erik H.; Barber, Samuel K.; Bouet, Nathalie; McKinney, Wayne R. et al.
Partner: UNT Libraries Government Documents Department

Topographic power spectral density study of the effect of surface treatment processes on niobium for superconducting radio frequency accelerator cavities

Description: Microroughness is viewed as a critical issue for attaining optimum performance of superconducting radio frequency accelerator cavities. The principal surface smoothing methods are buffered chemical polish (BCP) and electropolish (EP). The resulting topography is characterized by atomic force microscopy (AFM). The power spectral density (PSD) of AFM data provides a more thorough description of the topography than a single-value roughness measurement. In this work, one dimensional average PSD functions derived from topography of BCP and EP with different controlled starting conditions and durations have been fitted with a combination of power law, K correlation, and shifted Gaussian models to extract characteristic parameters at different spatial harmonic scales. While the simplest characterizations of these data are not new, the systematic tracking of scale-specific roughness as a function of processing is new and offers feedback for tighter process prescriptions more knowledgably targeted at beneficial niobium topography for superconducting radio frequency applications.
Date: April 1, 2012
Creator: Charles Reece, Hui Tian, Michael Kelley, Chen Xu
Partner: UNT Libraries Government Documents Department

BINERY PSEUDO-RANDOM GRATING AS A STANDARD TEST SURFACE FOR MEASUREMENT OF MODULATION TRANSFER FUNCTION OF INTERFEROMETRIC MICROSCOPES.

Description: The task of designing high performance X-ray optical systems requires the development of sophisticated X-ray scattering calculations based on rigorous information about the optics. One of the most insightful approaches to these calculations is based on the power spectral density (PSD) distribution of the surface height. The major problem of measurement of a PSD distribution with an interferometric and/or atomic force microscope arises due to the unknown Modulation Transfer Function (MTF) of the instruments. The MTF characterizes the perturbation of the PSD distribution at higher spatial frequencies. Here, we describe a new method and dedicated test surfaces for calibration of the MTF of a microscope. The method is based on use of a specially designed Binary Pseudo-random (BPR) grating. Comparison of a theoretically calculated PSD spectrum of a BPR grating with a spectrum measured with the grating provides the desired calibration of the instrumental MTF. The theoretical background of the method, as well as results of experimental investigations are presented.
Date: August 1, 2007
Creator: YASHCHUK,V.V.; MCKINNEY, W.R. & TAKACS, P.Z.
Partner: UNT Libraries Government Documents Department

2D Spatial Frequency Considerations in Comparing 1D Power Spectral Density Measurements

Description: The frequency footprint of ID and 2D profiling instruments needs to be carefully considered in comparing ID surface roughness spectrum measurements made by different instruments. Contributions from orthogonal direction frequency components can not be neglected. The use of optical profiling instruments is ubiquitous in the measurement of the roughness of optical surfaces. Their ease-of-use and non-contact measurement method found widespread use in the optics industry for measuring the quality of delicate optical surfaces. Computerized digital data acquisition with these instruments allowed for quick and easy calculation of surface roughness statistics, such as root-mean-square (RMS) roughness. The computing power of the desktop computer allowed for the rapid conversion of spatial domain data into the frequency domain, enabling the application of sophisticated signal processing techniques to be applied to the analysis of surface roughness, the most powerful of which is the power spectral density (PSP) function. Application of the PSD function to surface statistics introduced the concept of 'bandwidth-limited' roughness, where the value of the RMS roughness depends critically upon the spatial frequency response of the instrument. Different instruments with different spatial frequency response characteristics give different answers when measuring the same surface.
Date: June 14, 2010
Creator: Takacs, P.Z.; Barber, S.; Church, E.L.; Kaznatcheev, K.; McKinney, W.R. & Yashchuk, V.Y.
Partner: UNT Libraries Government Documents Department

Detection of gear wear on the 757/767 internal drive generator using higher order spectral analysis and wavelets

Description: The 757/767 internal drive generator (IDG), which provides 400 Hz/120 volt ac power to the aircraft cabin experiences failures due to seizure of the scavenger drive pump and/or axial gears on the main drive shaft of the unit. These generators are an integral part of the aircraft`s engines sitting outboard, inside the engine cowling. The seizure of gears represents a significant loss with gear replacement estimated at $17,000 and unit replacement costs at $250,000. One of the U.S. commercial airline companies engaged Oak Ridge National Laboratory in a brief study to determine if a methodology could be developed to interrogate and diagnose gear wear with the ultimate goal of deploying an instrument for test stand and flight line use. Through a structured analysis it was determined that accelerometers mapped with higher order spectral analysis (HOSA) and/or wavelets could provide an analytic approach and basis for a diagnostic sensor/system capable of assessing IDG gear wear on the aircraft or the test stand.
Date: January 1, 1997
Creator: Allgood, G.O.; Van Hoy, B.W. & Ayers, C.W.
Partner: UNT Libraries Government Documents Department

Comprehensive Flow Meter for All Materials. Final report

Description: The electromagnetic flowmeter is obstructionless and insensitive to the metered stuff's constitutive properties. For low zero-point drift, EM flowmeters employ a low frequency alternating induction, usually with square waveshape. With conventional signal conditioning, high frequency induction leads to excessive zero-point drift for the instrument. The conventional instrument is usable with electrically conductive fluids, where there is no triboelectric noise. Nonconductive fluids have substantial triboelectric noise, with spectral density experimentally measured to be f{sup {minus}2.6}. Here we use an electromagnet and signal conditioner that allows high frequency induction, where the noise is low, but eliminates the heretofore excessive drift--such that the EM flowmeter can be used to meter any stuff, whether conductive or insulating, that can be pumped, blown or extruded through a pipe. Designs and test hardware are shown. An injury occurred, with slow recovery: the principal investigator could not do all the flow test stand work desired. As an option, the flow testing has been simulated on a computer. Using characteristics of transformer oil as the metered fluid, the new signal conditioner has produced: (1) signal/noise/drift behavior experienced in prior published work, and (2) signal--without noise and drift--with performance of today's commercial EM flowmeters.
Date: November 15, 1999
Partner: UNT Libraries Government Documents Department

Power spectral density specifications for high-power laser systems

Description: This paper describes the use of Fourier techniques to characterize the transmitted and reflected wavefront of optical components. Specifically, a power spectral density, (PSD), approach is used. High power solid-state lasers exhibit non-linear amplification of specific spatial frequencies. Thus, specifications that limit the amplitude of these spatial frequencies are necessary in the design of these systems. Further, NIF optical components have square, rectangular or irregularly shaped apertures with major dimensions up-to 800 mm. Components with non-circular apertures can not be analyzed correctly with Zernicke polynomials since these functions are an orthogonal set for circular apertures only. A more complete and powerful representation of the optical wavefront can be obtained by Fourier analysis in 1 or 2 dimensions. The PSD is obtained from the amplitude of frequency components present in the Fourier spectrum. The shape of a resultant wavefront or the focal spot of a complex multicomponent laser system can be calculated and optimized using PSDs of the individual optical components which comprise the system. Surface roughness can be calculated over a range of spatial scale-lengths by integrating the PSD. Finally, since the optical transfer function (OTF) of the instruments used to measure the wavefront degrades at high spatial frequencies, the PSD of an optical component is underestimated. We can correct for this error by modifying the PSD function to restore high spatial frequency information. The strengths of PSD analysis are leading us to develop optical specifications incorporating this function for the planned National Ignition Facility (NIF).
Date: April 22, 1996
Creator: Lawson, J.K.; Aikens, D.A.; English, R.E. Jr. & Wolfe, C.R.
Partner: UNT Libraries Government Documents Department

Generation of time histories with a specified auto spectral density, skewness, and kurtosis

Description: Some dynamic environments are characterized by time histories that are not Gaussian. A more accurate simulation of these environments can be generated if a realization of a non Gaussian time history can be reproduced which has a specified auto spectral density (also called power spectral density) and a specified skewness and kurtosis (not necessarily the skewness and kurtosis of a Gaussian time history). The mean square of the waveform is reproduced if the spectrum is reproduced. Modern waveform reproduction techniques can be used to reproduce the realized waveform on an electrodynamic or electrohydraulic shaker. A method is presented for the generation of realizations of zero mean non Gaussian random time histories with a specified auto spectral density, skewness, and kurtosis. Kurtosis, defined in this paper as E[{chi}{sup 4}]/E{sup 2}[{chi}{sup 2}], greater than 3 can be realized. Realizations of the random process are generated with a generalization of shot noise.
Date: February 1, 1996
Creator: Smallwood, D.O.
Partner: UNT Libraries Government Documents Department

A Roadmap to Recent Developments in the Theory of Turbulent Generation of Long-wavelength Flows

Description: A brief overview is given of recent results in the theory of turbulent generation of long-wavelength fluctuations; references are provided to more detailed calculations in the literature. Emphasis is placed on conceptual foundations and technical tools, which can be simply illustrated by studies of the scalar (one-field) generalized Hasegawa-Mima equation. Then a functional Hamiltonian formalism is discussed as a way of efficiently handling systems of coupled fields. Casimir invariants are shown to be the appropriate ''plasmon densities''; a tensor spectral-balance equation builds in the conservation constraints automatically. A concise expression can be obtained for the nonlinear growth rate in terms of the spectral density, a tensor generalization of the triad interaction time, and the metric tensor and structure constants of the Hamiltonian structure.
Date: March 16, 2004
Creator: Krommes, John A.
Partner: UNT Libraries Government Documents Department

Calibration of the modulation transfer function of surface profilometers with binary pseudo-random test standards: expanding the application range

Description: A modulation transfer function (MTF) calibration method based on binary pseudo-random (BPR) gratings and arrays [Proc. SPIE 7077-7 (2007), Opt. Eng. 47, 073602 (2008)] has been proven to be an effective MTF calibration method for a number of interferometric microscopes and a scatterometer [Nucl. Instr. and Meth. A616, 172 (2010)]. Here we report on a further expansion of the application range of the method. We describe the MTF calibration of a 6 inch phase shifting Fizeau interferometer. Beyond providing a direct measurement of the interferometer's MTF, tests with a BPR array surface have revealed an asymmetry in the instrument's data processing algorithm that fundamentally limits its bandwidth. Moreover, the tests have illustrated the effects of the instrument's detrending and filtering procedures on power spectral density measurements. The details of the development of a BPR test sample suitable for calibration of scanning and transmission electron microscopes are also presented. Such a test sample is realized as a multilayer structure with the layer thicknesses of two materials corresponding to BPR sequence. The investigations confirm the universal character of the method that makes it applicable to a large variety of metrology instrumentation with spatial wavelength bandwidths from a few nanometers to hundreds of millimeters.
Date: March 14, 2011
Creator: Yashchuk, Valeriy V.; Anderson, Erik H.; Barber, Samuel K.; Bouet, Nathalie; Cambie, Rossana; Conley, Raymond et al.
Partner: UNT Libraries Government Documents Department

Binary pseudo-random grating as a standard test surface formeasurement of modulation transfer function of interferometricmicroscopes

Description: The task of designing high performance X-ray optical systemsrequires the development of sophisticated X-ray scattering calculationsbased on rigorous information about the optics. One of the mostinsightful approaches to these calculations is based on the powerspectral density (PSD) distribution of the surface height. The majorproblem of measurement of a PSD distribution with an interferometricand/or atomic force microscope arises due to the unknown ModulationTransfer Function (MTF) of the instruments. The MTF characterizes theperturbation of the PSD distribution at higher spatial frequencies. Here,we describe a new method and dedicated test surfaces for calibration ofthe MTF of a microscope. The method is based on use of a speciallydesigned Binary Pseudo-random (BPR) grating. Comparison of atheoretically calculated PSD spectrum of a BPR grating with a spectrummeasured with the grating provides the desired calibration of theinstrumental MTF. The theoretical background of the method, as well asresults of experimental investigations are presented.
Date: July 25, 2007
Creator: Yashchuk, Valeriy V.; McKinney, Wayne R. & Takacs, Peter Z.
Partner: UNT Libraries Government Documents Department