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Environmentally friendly polysilane photoresists

Description: Several novel polysilanes synthesized by the free-radical hydrosilation of oligomeric polyphenylsilane or poly(p-tert- butylphenylsilane) were examined for lithographic behavior. This recently developed route into substituted polysilanes has allowed for the rational design of a variety of polysilanes with a typical chemical properties such as alcohol and aqueous base solubility. Many of the polysilane resists made could be developed in aqueous sodium carbonate and bicarbonate solutions. These materials represent environmentally friendly polysilane resists in both their synthesis and processing.
Date: December 31, 1995
Creator: Beach, J.V.; Loy, D.A.; Hsiao, Yu-Ling & Waymouth, R.M.
Partner: UNT Libraries Government Documents Department

Improved Synthesis of [Si6Cl14]2-Salts as Precursors for Si6H12and other Novel Silanes

Description: The reaction of excess HSiCl{sub 3} with the aforementioned triamines led to the formation of [Si{sub 6}Cl{sub 14}]{sup 2-} containing salts in all instances. The isolated complex salts were characterized using FT-IR and elemental analysis. IR spectra of these compounds showed characteristic Si-H stretching modes around 2100cm{sup -1} due to the hexacoordinate silane cation and Si-Cl active modes near 528cm{sup -1} as a result of the cyclic dianion. Reaction yields and elemental analysis (CHN) of the salts are summarized in a table. The reaction of peralkylated triamines with HSiCl{sub 3} in dry CH{sub 2}Cl{sub 2} gives ionic compounds based upon the tetradecachlorocyclohexasilane dianion. Several substituted triamines(R{sub 2}NC{sub 2}H{sub 4}NR{prime}C{sub 2}H{sub 4}NR{sub 2}where R = R{prime} = Et, {sup n}Pr; R = Et, R{prime}= {sup n}Bu, {sup n}Hexyl, Benzyl) were examined for this reaction and N,N,N{prime},N{prime}-tetraethyl-N{sup {double_prime}}-benzyl-diethylenetriamine produced the best yields of [Si{sub 6}Cl{sub 14}]{sup 2-} salt at 23% based on the amine reagent. This improvement in yield could be attributed to the decreased nucleophilicity of the central amine through increased steric hindrance of the alkyl substituents. The overall consequence of this substituent variation study has revealed new reagents for the synthesis of [Si{sub 6}Cl{sub 14}]{sup 2-} salts and further demonstrated the ability of triamines to efficiently dismutate, complex, and condense chlorosilanes. The increased production of these salts has also opened a route for the study of Si{sub 6}X{sub 12} and its Lewis acid/base adducts.
Date: August 18, 2009
Creator: Anderson, Kenneth; Dai, Xuliang; Nelson, Kendric; Schulz, Doug & Boudjouk, Philip
Partner: UNT Libraries Government Documents Department

INOR-037: Encapsulation of hazardous metals with organic modified minerals

Description: The authors studies have focused on the development of new materials for the control, treatment, and long term storage of hazardous metals. The process involves the introduction of hazardous cations into the matrix of clays through aqueous ion-exchange methods. These cations are subsequently encapsulated within the clay by treating the material with a variety of organic silanes. This treatment results in the formation of organic coatings which are chemically bonded to the surface of the clay. The coatings are hydrophobic in nature, and may restrict the diffusion of water into and out of the pores contained within the clay. The goal of this process is to reduce the undesirable migration of hazardous metals from the ion-exchanged clays into the environment. A smectic type clay, bentonite, has been the primary inorganic matrix for this study. Bentonite, which is a form of montmorillonite, consists of two-dimensional sheets of aluminosilicates. Like other smectite clays, these sheets are separated by an interlayer which contains cations and water. The reactive groups within the alkyl silanes react with hydroxyl groups on the clay surface, as well as water contained on and within the clay. The authors results show that there is little difference in the metal content of the coated and noncoated clays. The cations are not removed from the clay by exposure to the silane. The clays also maintain their general structure and cystallinity upon surface modification. The organic coatings are stable to 500{degrees}C when heated under nitrogen. The ability of these systems to encapsulate the cations and prevent their migration into the environment is currently being evaluated.
Date: December 31, 1995
Creator: Song, Kang; Wasserman, R. & Yuchs, S.E.
Partner: UNT Libraries Government Documents Department

Polymethylsilsesquioxanes through base-catalyzed redistribution of oligomethylhydridosiloxanes

Description: There has been an increasing amount of interest in silsesquioxanes and polysilsesquioxanes. They have been used as models for silica surfaces and have been shown to have great potential for several industrial applications. Typical synthesis of polysilsesquioxanes involves the hydrolysis of organotricholorosilanes and/or organotrialkoxysilanes in the presence of acid or base catalysts, usually in the presence of organic solvents.
Date: April 4, 2000
Creator: RAHIMIAN,KAMYAR; ASSINK,ROGER A. & LOY,DOUGLAS A.
Partner: UNT Libraries Government Documents Department

Stopping the growth of particles to silica-supported mono-nuclear Ru hydride surface species by tuning silica with surface silanes

Description: Tuning silica by replacing surface silanols with silanes allows chemical grafting of Ru(COD)(COT) through a covalent Ru-Si bond, as evidenced by elemental analysis, IR spectroscopy and EXAFS. Treatment of these surface species under H2 at 300 oC yields a mononuclear Ru hydride species, without any sintering of the metal according to TEM and EXAFS analyses. This supported system displays catalytic properties different from those of supported Ru particles (2 nm), selectively hydrogenating olefins over aromatics.
Date: July 11, 2007
Creator: Berthoud, Romain; Fenet, Bernard; Lukens, Wayne; Pelzer, Katrin; Basset, Jean-Marie; Candy, Jean-Pierre et al.
Partner: UNT Libraries Government Documents Department

Liquid Silane Routes to Electronic Materials

Description: New chemistries based upon liquid cyclohexasilane (Si{sub 6}H{sub 12} or CHS) have been used as precursors to silicon-containing electronic materials. Spin-coating of CHS-based inks with subsequent UV light and/or thermal treatment yielded amorphous silicon (a-Si:H) films. While initial ink chemistries gave a-Si:H with high resistivity (i.e., > 10{sup 6} {Omega}.cm), several doping strategies are under development to address this limitation. In this contribution, the current status of solution processed rectifying diodes and field effect transistors fabricated from CHS-based inks will be presented. Additionally, a new printing approach termed collimated aerosol beam direct write (CAB-DW{sup TM}) was developed that allows the deposition of printed Ag lines 5 {mu}m in width. A status update will be given where CHS-based inks have been used to CAB-DW silicon-based features with linewidths <10 {mu}m. Assuming silicon thin film materials with good electrical properties will be developed, there may be significant cost advantages associated with the ability to controllably deposit the semiconductor in a metered fashion.
Date: December 4, 2008
Creator: Schulz, Douglas L.; Dai, Xuliang; Nelson, Kendric J.; Pokhodnya, Konstantin; Hoey, Justin M.; Akhatov, Iskander S. et al.
Partner: UNT Libraries Government Documents Department

Electrospun a-Si using Liquid Silane/Polymer Inks

Description: Amorphous silicon nanowires (a-SiNWs) were prepared by electrospinning cyclohexasilane (Si{sub 6}H{sub 12}) admixed with polymethylmethacrylate (PMMA) in toluene. Raman spectroscopy characterization of these wires (d {approx} 50-2000 nm) shows 350 C treatment yields a-SiNWs. Porous a-SiNWs are obtained using a volatile polymer.
Date: December 9, 2010
Creator: Schulz, Doug
Partner: UNT Libraries Government Documents Department

Electrospun a-Si using Liquid Silane/Polymer Inks

Description: Amorphous silicon nanowires (a-SiNWs) were prepared by electrospinning cyclohexasilane (Si{sub 6}H{sub 12}) admixed with polymethylmethacrylate (PMMA) in toluene. Raman spectroscopy characterization of these wires (d {approx} 50-2000 nm) shows 350 C treatment yields a-SiNWs. Porous a-SiNWs are obtained using a volatile polymer.
Date: December 1, 2010
Creator: Schulz, D.L.; Hoey, J.M.; Smith, J.; Lovaasen, J.; Braun, C.; Dai, X. et al.
Partner: UNT Libraries Government Documents Department

Metal Carbonyl-Hydrosilane Reactions and Hydrosilation Catalysis

Description: Manganese carbonyl complexes serve as hydrosilation precatalysts for selectively transforming a carbonyl group into a siloxy methylene or a fully reduced methylene group. Substrates of interest include (1) aldehydes, ketones, carboxylic acids, silyl esters, and esters, and (2) their organometallic acyl counterparts. Three relevant catalytic reactions are shown. Two types of manganese precatalysts have been reported: (a) alkyl and acyl complexes (L)(C0){sub 4}MnR [L = CO, PPh{sub 3}; R = COCH{sub 3}, COPh, CH{sub 3}] and (b) halides (CO){sub 5}MnX and [(CO){sub 4}MnX]{sub 2} (X = Br, I). The former promote hydrosilation and deoxygenation catalysis; the latter promote dehydrogenative silation of alcohols and carboxylic acids as well as hydrosilation and deoxygenation of some metallocarboxylic acid derivatives. In every case studied, these Mn precatalysts are far more reactive or selective than traditional Rh(I) precatalysts.
Date: April 14, 2001
Creator: Cutler, A. R.
Partner: UNT Libraries Government Documents Department

Structural Modification of Sol-Gel Materials through Retro Diels-Alder Reaction

Description: Hydrolysis and condensation of organically bridged bis-triethoxysilanes, (EtO){sub 3}Si-R-Si(OEt){sub 3}, results in the formation of three dimensional organic/inorganic hybrid networks (Equation 1). Properties of these materials, including porosity, are dependent on the nature of the bridging group, R. Flexible groups (akylene-spacers longer than five carbons in length) polymerize under acidic conditions to give non-porous materials. Rigid groups (such as arylene-, alkynylene-, or alkenylene) form non-porous, microporous, and macroporous gels. In many cases the pore size distributions are quite narrow. One of the motivations for preparing hybrid organic-inorganic materials is to extend the range of properties available with sol-gel systems by incorporating organic groups into the inorganic network. For example, organically modified silica gels arc either prepared by co-polymerizing an organoalkoxysilane with a silica precursor or surface silylating the inorganic gel. This can serve to increase hydrophobicity or to introduce some reactive organic functionality. However, the type and orientation of these organic functionalities is difficult to control. Furthermore, many organoalkoxysilanes can act to inhibitor even prevent gelation, limiting the final density of organic functionalities. We have devised a new route for preparing highly functionalized pores in hybrid materials using bridging groups that are thermally converted into the desired functionalities after the gel has been obtained. In this paper, we present the preparation and characterization of bridged polysilsesquioxanes with Diels-Alder adducts as the bridging groups from the sol-gel polymerization of monomers 2 and 4. The bridging groups are constructed such that the retro Diela-Alder reaction releases the dienes and leaves the dienophiles as integral parts of the network polymers. In the rigid architecture of a xerogel, this loss of organic functionality should liberate sufficient space to modify the overall porosity. Furthermore, the new porosity will be functionalized with the dienophilic olefin bridging group. We also demonstrate that by changing the type of ...
Date: December 8, 1999
Creator: SHALTOUT,RAAFAT M.; LOY,DOUGLAS A.; MCCLAIN,MARK D.; PRABAKAR,SHESHASAYANA; GREAVES,JOHN & SHEA,KENNETH J.
Partner: UNT Libraries Government Documents Department

Thin-film silica sol-gels doped with ion responsive fluorescent lipid bilayers

Description: A metal ion sensitive, fluorescent lipid-b i layer material (5oA PSIDA/DSPC) was successfully immobilized in a silica matrix using a tetramethoxysilane (TMOS) sol-gel procedure. The sol-gel immobilization method was quantitative in the entrapment of seif-assembled Iipid-bilayers and yielded thin films for facile configuration to optical fiber piatforms. The silica matrix was compatible with the solvent sensitive lipid bilayers and provided physical stabilization as well as biological protection. Immobilization in the silica sol-gel produced an added benefit of improving the bilayer's metal ion sensitivity by up to two orders of magnitude. This enhanced performance was attributed to a preconcentrator effect from the anionic surface of the silica matrix. Thin gels (193 micron thickness) were coupled to a bifurcated fiber optic bundle to produce a metal ion sensor probe. Response times of 10 - 15 minutes to 0.1 M CUCIZ were realized with complete regeneration of the sensor using an ethylenediarninetetraacetic acid (EDTA) solution.
Date: January 12, 1999
Creator: Sasaki, D.Y.; Shea, L.E. & Sinclair, M.B.
Partner: UNT Libraries Government Documents Department

Surface functionalization of silica microparticles for capillary electrochromatography (CEC)

Description: We derivatized small (0.5 -3 {mu}m) silica particles by silating their surfaces with long-chain alkyl substituted silanes. These functionalized particles were packed into 100 {mu}m capillaries and used as stationary phases for capillary electrochromatography. The particles supported electroosmotic flow in mixtures of acetonitrile and aqueous buffer (4 mM sodium tetraborate or 2mM TRIS). The columns were used to separate mixtures of organic analytes demonstrating the effectiveness of the functionalized stationary phase.
Date: January 1, 1997
Creator: Shepodd, T.J.; Anex, D.S. & Rognlien, J.
Partner: UNT Libraries Government Documents Department

LDRD final report on chemical functionalization of oligo(hydrido)silanes, economically attractive routes to new photoresponsive materials

Description: Metathesis-catalyzed polymerizations of primary silanes were performed to generate polysilanes suitable for functionalization with a variety of side groups. Modeling was employed to predict conformations and estimate electronic properties of candidate functionalized polysilanes. Chemical functionalization of oligo(hydrido)silanes with terminal {alpha}, {omega}-dienes under free radical conditions yielded highly crosslinked, nonporous polysilane networks. Ketone reduction with oligo(hydrido)silanes under free radical conditions led to novel poly(phenylalkoxysilanes). Free radical reduction of terminal alkenyl(alkoxy)silanes forms functionalized polysilanes which can be further transformed into sol-gel matrices with the polysilane functionality intact. These gels may be processed into nonporous xerogels or high surface area aerogels.
Date: May 1, 1997
Creator: Jamison, G.M.; Loy, D.A. & Curro, J.G.
Partner: UNT Libraries Government Documents Department

Patterned functional arrays by selective de-wetting

Description: Using a micro-Contact Printing ({mu}-CP) technique, substrates are prepared with patterns of hydrophilic, hydroxyl-terminated SAMS and hydrophobic methyl-terminated SAMS. Beginning with a homogeneous solution of silica, surfactant, ethanol, water, and functional silane, preferential ethanol evaporation during dip-coating, causes water enrichment and selective de-wetting of the hydrophobic SAMS. Correspondingly, film deposition occurs exclusively on the patterned hydrophilic SAMS. In addition, by co-condensation of tetrafunctional silanes (Si(OR){sub 4}) with tri-functional organosilanes ((RO){sub 3}Si(CH{sub 2}){sub 3}NH{sub 2}), the authors have selectively derived the silica framework with functional amine NH{sub 2} groups. A pH sensitive, micro-fluidic system was formed by further conjugation reactions with pH sensitive dye molecules.
Date: May 11, 2000
Creator: FAN,HONGYOU; DOSHI,DHAVAL; LU,YUNFENG & BRINKER,C. JEFFREY
Partner: UNT Libraries Government Documents Department

Porosity in polysilsesquioxane xerogels

Description: Polysilsesquioxanes, [RSiO{sub 1.5}]{sub n} are a class of hybrid organic-inorganic materials in which silicon atoms are linked with up to three siloxane bonds to other monomer units in the polymer and the organic group is a pendent functionality. Polysilsesquioxanes are prepared by the hydrolysis and condensation of organotrialkoxysilanes (Scheme l). Organotrialkoxysilanes RSi(OR{prime}){sub 3}, have been extensively used as coupling agents for composites or surface treatments for materials. Polysilsesquioxanes have become increasingly popular for generating specialty coatings such as low k dielectric materials for microelectronic applications. While there is extensive information on the formation of polysilsesquioxanes, there has not been a survey of the ability of organotrialkoxysilanes to form gels until recently. The formation of polysilsesquioxanes gels has been shown to be very sensitive to the nature of the organic group. Many monomers will only form soluble oligomers or polymers upon hydrolysis and condensation, even when the reaction is conducted solvent-free with neat monomer and aqueous catalyst. Furthermore, there is little information concerning the influence of the organic group, R, on the porosity of the polysilsesquioxanes gels that are formed. In this paper the authors describe the preparation of polysilsesquioxane gels where R = H, methyl, ethyl, cyanoethyl, vinyl, dodecyl, hexadecyl, octadecyl, chloromethyl, and chloromethylphenyl, and the characterization of the porosity of the respective xerogels. Gels were prepared from the hydrolysis and condensation of organotrimethoxysilanes, RSi(OEt){sub 3}, and organotriethoxy-silanes, RSi(OEt){sub 3}.
Date: May 9, 2000
Creator: LOY,DOUGLAS A.; SCHNEIDER,DUANE A.; BAUGHER,BRIGITTA M. & RAHIMIAN,KAMYAR
Partner: UNT Libraries Government Documents Department

The addition of disilanes to cumulenes

Description: The syntheses of silicon-containing compounds and the studies of their rearrangements have been active research areas in the Barton research group. Previously, the addition of disilanes to acetylenes was studied in the group and an intramolecular 2S + 2A mechanism has been proposed. In this thesis, the work is focused on the addition of disilanes to cumulenes. The syntheses of the precursors are discussed and the possible mechanisms for their thermal, photochemical and catalytic rearrangements are proposed. Conjugated organic polymers have been studied in the group since 1985 because of their potential for exhibiting high electroconductivity, photoconductivity, strong non-linear optical response and intense fluorescence. In the second section of this dissertation, the synthesis and property studies of poly(phenylene vinylene) analogues are discussed.
Date: October 8, 1997
Creator: Chen, Y.
Partner: UNT Libraries Government Documents Department

Polymerization of trialkoxysilanes. Effect of the organic substituent on the formation of gels

Description: Hydrolysis and condensation of trialkoxysilanes, R-Si(OR{prime}){sub 3}, generally leads to the formation of silsesquioxane oligomers and polymers. These polymers are composed of a monomer repeat unit, [R-SiO{sub 1.5}]{sub n}, with a single silicon atom attached to other repeat units in the polymer through one to three siloxane bonds. The remaining substituent is an organic group attached to the silicon through a silicon-carbon single bond. Silsesquioxanes have been the subject of intensive study in the past and are becoming important again as a vehicle for introducing organic functionalities into hybrid organic-inorganic materials through sol-gel processing. Despite all of this interest, there has not been a systematic study of the ability of trialkoxysilanes to form gels through the sol-gel process. In fact, it has been noted that silsesquioxanes are generally isolated as soluble resins rather than the highly crosslinked network polymers (gels) one would expect from a tri-functional monomer. In this study, the authors have examined the sol-gel chemistry of a variety of trialkoxysilanes with different organic substituents (R = H, Me, Et, n-Pr, i-Pr, n-Bu, i-Bu, t-Bu, n-octadecyl, n-dodecyl, cyclohexyl, vinyl, phenyl, benzyl, phenethyl), with methoxide or ethoxide substituents on silicon, at varying monomer concentrations ranging up to neat monomer, and with different catalysts (HCl, NaOH, formic acid, fluoride). Gels were prepared from tetramethoxysilane and tetraethoxysilane at identical concentrations for purposes of comparison.
Date: September 1, 1998
Creator: Loy, D.A.; Baugher, B.M. & Schneider, D.A.
Partner: UNT Libraries Government Documents Department

Rapid prototyping of patterned functional nanostructures

Description: Living systems exhibit form and function on multiple length scales, and the prospect of imparting life-like qualities to man-made materials has inspired many recent efforts to devise hierarchical materials assembly strategies. For example, Yang et al. grew surfactant-templated mesoporous silica on hydrophobic patterns prepared by micro-contact printing {micro}CP{sup 3}. Trau et al. formed oriented mesoporous silica patterns, using a micro-molding in capillaries MIMIC technique, and Yang et al. combined MIMIC, polystyrene sphere templating, and surfactant-templating to create oxides with three levels of structural order. Overall, great progress has been made to date in controlling structure on scales ranging from several nanometers to several micrometers. However, materials prepared have been limited to oxides with no specific functionality, whereas for many of the envisioned applications of hierarchical materials in micro-systems, sensors, waveguides, photonics, and electronics, it is necessary to define both form and function on several length scales. In addition, the patterning strategies employed thus far require hours or even days for completion. Such slow processes are inherently difficult to implement in commercial environments. The authors have combined evaporation-induced (silica/surfactant) self-assembly EISA with rapid prototyping techniques like pen lithography, ink-jet printing, and dip-coating on micro-contact printed substrates to form hierarchically organized structures in seconds. In addition, by co-condensation of tetrafunctional silanes (Si(OR){sub 4}) with tri-functional organosilanes ((RO){sub 3}SiR{prime}){sup 12--14} or by inclusion of organic additives, the authors have selectively derivatized the silica framework with functional R{prime} ligands or molecules. The resulting materials exhibit form and function on multiple length scales: on the molecular scale, functional organic moieties are positioned on pore surfaces, on the mesoscale, monosized pores are organized into 1-, 2-, or 3-dimensional networks, providing size-selective accessibility from the gas or liquid phase, and on the macroscale, 2-dimensional arrays and fluidic or photonic systems may be defined.
Date: February 9, 2000
Creator: Fan, Hongyou; Lu, Yunfeng; Stump, Aaron; Reed, Scott T.; Baer, Thomas A.; Schunk, P. Randall et al.
Partner: UNT Libraries Government Documents Department

Humidity Dependence of Adhesion for Silane Coated Microcantilevers

Description: This study examines adhesion between silane-coated micromachined surfaces that are exposed to humid conditions. Our quantitative values for interfacial adhesion energies are determined from an in-situ optical measurement of deformations in partly-adhered cantilever beams. We coated micromachined cantilevers with either ODTS (C{sub 18}H{sub 37}SiCl{sub 3}) or FDTS (C{sub 8}F{sub 17}C{sub 2}H{sub 4}SiCl{sub 3}) with the objective of creating hydrophobic surfaces whose adhesion would be independent of humidity. In both cases, the adhesion energy is significantly lower than for uncoated, hydrophilic surfaces. For relative humidities (RH) less than 95% (ODTS) and 80% (FDTS) the adhesion energy was extremely low and constant. In fact, ODTS-coated beams exposed to saturated humidity conditions and long (48 hour) exposures showed only a factor of two increase in adhesion energy. Surprisingly, FDTS coated beams, which initially have a higher contact angle (115{degree}) with water than do ODTS coated beams (112{degree}), proved to be much more sensitive to humidity. The FDTS coated surfaces showed a factor of one hundred increase in adhesion energy after a seven hour exposure to 90% RH. Atomic force microscopy revealed agglomerated coating material after exposed to high RH, suggesting a redistribution of the monolayer film. This agglomeration was more prominent for FDTS than ODTS. These findings suggest a new mechanism for uptake of moisture under high humidity conditions. At high humidities, the silane coatings can reconfigure from a surface to a bulk phase leaving behind locally hydrophilic sites which increase the average measured adhesion energy. In order for the adhesion increase to be observed, a significant fraction of the monolayer must be converted from the surface to the bulk phase.
Date: November 9, 1999
Creator: DE BOER,MAARTEN P.; MAYER,THOMAS M.; CARPICK,ROBERT W.; MICHALSKE,TERRY A.; SRINIVASAN,U. & MABOUDIAN,R.
Partner: UNT Libraries Government Documents Department

Enhanced Electron Attachment to Highly-Excited States of Molecules: Implications for Plasma Processing Discharges

Description: Recent studies show that large negative ion densities exist in plasma processing discharges, including those of weakly electronegative gases such as SiH{sub 4} and CF{sub 4}. Also, there is strong evidence that the negative ions could be the precursors for particulate formation in processing discharges. Even though it is now well established that large concentrations of negative ions exist in processing discharges, and that they play a crucial role in such discharges, the source of such high negative ion densities has not been clarified. In particular, gases like SiH{sub 4} and CH{sub 4}, which are commonly used in processing discharges, attach electrons only weakly in their ground electronic states (see the references). Due to the lack of an alternative mechanism, the origin of large negative ion densities in such weakly electronegative gases has been frequently attributed to electron attachment to radicals (molecular fragments) or other byproducts produced in the discharge. This hypothesis had not been tested in direct electron attachment measurements.
Date: June 29, 1998
Creator: Datskos, P.G.; Ding, W.; McCorkle, D.L. & Pinnaduwage, L.A.
Partner: UNT Libraries Government Documents Department

High-purity, isotopically enriched bulk silicon

Description: The synthesis and characterization of dislocation-free, undoped, single crystals of Si enriched in all 3 stable isotopes is reported: {sup 28}Si (99.92%), {sup 29}Si (91.37%), and {sup 30}Si (89.8%). A silane-based process compatible with the relatively small amounts of isotopically enriched precursors that are practically available was used. The silane is decomposed to silicon on a graphite starter rod heated to 700-750 C in a recirculating flow reactor. A typical run produces 35 gm of polycrystalline Si at a growth rates of 5 {micro}m/min and conversion efficiency >95%. Single crystals are grown by the floating zone method and characterized by electrical and optical measurements. Concentrations of shallow dopants (P and B) are as low as mid-10{sup 13} cm{sup -3}. Concentrations of C and O lie below 10{sup 16} and 10{sup 15} cm{sup -3}, respectively.
Date: November 17, 2004
Creator: Ager III, J.W.; Beeman, J.W.; Hansen, W.L.; Haller, E.E.; Sharp, I.D.; Liao, C. et al.
Partner: UNT Libraries Government Documents Department