Grain orientation measurement of passivated aluminum interconnectsby x-ray micro diffraction
Description:
The crystallographic orientations of individual grains in apassivated aluminum interconnect line of 0.7-mu m width were investigatedby using an incidentwhite x-ray microbeam at the Advanced Light Source,Berkeley National Laboratory. Intergrain orientation mapping was obtainedwith about 0.05o sensitivity by the micro Laue diffractiontechnique.
Date:
July 1, 1999
Creator:
Chang, Chang-Hwan.; Valek, B. C.; Padmore, H. A.; MacDowell, A. A.; Celestre, R.; Marieb, T. et al.
Item Type:
Refine your search to only
Article
Partner:
UNT Libraries Government Documents Department