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Grain orientation measurement of passivated aluminum interconnectsby x-ray micro diffraction

Description: The crystallographic orientations of individual grains in apassivated aluminum interconnect line of 0.7-mu m width were investigatedby using an incidentwhite x-ray microbeam at the Advanced Light Source,Berkeley National Laboratory. Intergrain orientation mapping was obtainedwith about 0.05o sensitivity by the micro Laue diffractiontechnique.
Date: July 1, 1999
Creator: Chang, Chang-Hwan.; Valek, B. C.; Padmore, H. A.; MacDowell, A. A.; Celestre, R.; Marieb, T. et al.
Partner: UNT Libraries Government Documents Department
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