Description: This paper describes a method to arbitrarily shape and homogenize high-coherence extreme ultraviolet sources using time-varying holographic optical elements and a scanning subsystem to mitigate speckle. In systems with integration times longer than 100 ms, a speckle contrast below 1% can be achieved.
Date: August 1, 2010
Creator: Anderson, Christopher N.; Miyakawa, Ryan H. & Naulleau, Patrick
Item Type: Refine your search to only Article
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