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Comment on "Modification of graphene properties due to electron-beam irradiation"

Description: This article gives comment to a previous article entitled 'Modification of graphene properties due to electron-beam irradiation'. These articles discuss the modification of graphene properties due to electron-beam irradiation.
Date: December 17, 2009
Creator: Jones, Jason D.; Ecton, Philip A.; Mo, Yudong & Pérez, José M.
Partner: UNT College of Arts and Sciences

Tools for Nanotechnology Education Development Program

Description: The overall focus of this project was the development of reusable, cost-effective educational modules for use with the table top scanning electron microscope (TTSEM). The goal of this project's outreach component was to increase students' exposure to the science and technology of nanoscience.
Date: September 27, 2010
Creator: Moore, Dorothy
Partner: UNT Libraries Government Documents Department

In situ nanoindentation in a transmission electron microscope

Description: This dissertation presents the development of the novel mechanical testing technique of in situ nanoindentation in a transmission electron microscope (TEM). This technique makes it possible to simultaneously observe and quantify the mechanical behavior of nano-scale volumes of solids.
Date: December 2, 2002
Creator: Minor, Andrew M.
Partner: UNT Libraries Government Documents Department

Quantitative in situ nanoindentation of aluminum films

Description: We report the development of a method for quantitative, in situ nanoindentation in an electron microscope and its application to study the onset of deformation during the nanoindentation of aluminum films. The load-displacement curve developed during in situ nanoindentation shows the characteristic ''staircase'' instability at the onset of plastic deformation. The instability corresponds to the first appearance of dislocations in previously defect-free grains, and occurs at a force near that measured in conventional nanoindentation experiments on similarly oriented Al grains. Plastic deformation proceeds through the formation and propagation of prismatic loops punched into the material, and half-loops that emanate from the sample surface. This new experimental technique permits the direct observation of the microstructural mechanisms that operate at the onset of deformation.
Date: April 4, 2001
Creator: Minor, Andrew M.; Stach, Eric A. & Morris, J. W., Jr.
Partner: UNT Libraries Government Documents Department

Carbon contamination of extreme ultraviolet (EUV) mask and its effect on imaging

Description: Carbon contamination of extreme ultraviolet (EUV) masks and its effect on imaging is a significant issue due to lowered throughput and potential effects on imaging performance. In this work, a series of carbon contamination experiments were performed on a patterned EUV mask. Contaminated features were then inspected with a reticle scanning electron microscope (SEM) and printed with the SEMA TECH Berkeley Microfield-Exposure tool (MET) [1]. In addition, the mask was analyzed using the SEMA TECH Berkeley Actinic-Inspection tool (AIT) [2] to determine the effect of carbon contamination on the absorbing features and printing performance. To understand the contamination topography, simulations were performed based on calculated aerial images and resist parameters. With the knowledge of the topography, simulations were then used to predict the effect of other thicknesses of the contamination layer, as well as the imaging performance on printed features.
Date: February 2, 2009
Creator: Fan, Yu-Jen; Yankulin, Leonid; Antohe, Alin; Garg, Rashi; Thomas, Petros; Mbanaso, Chimaobi et al.
Partner: UNT Libraries Government Documents Department

Electron Microscopy Study of Annealed (Ni, Zn, Co)Fe204

Description: (Ni,Zn)Fe{sub 2}O{sub 4} samples containing small amounts of Co were characterized in a transmission electron microscope to ascertain the micro structural changes accompanying low-temperature oxidation of the samples. Although no new features resulting from oxidation were observed, prominent surface reduction occurred in the thin foil specimens. Formation and growth of Ni particles on the ferrite surface are explained using the heats of formation of the oxides.
Date: July 1, 1980
Creator: Harmer, M. H.; Mishra, R. K. & Thomas, G.
Partner: UNT Libraries Government Documents Department

Thorough characterization of a EUV mask

Description: We reported that we were successful in our 45nm technology node device demonstration in February 2008 and 22nm node technology node device patterning in February 2009 using ASML's Alpha Demo Tool (ADT). In order to insert extreme ultraviolet (EUV) lithography at the 15nm technology node and beyond, we have thoroughly characterized one EUV mask, a so-called NOVACD mask. In this paper, we report on three topics, The first topic is an analysis of line edge roughness (LER) using a mask Scanning Electron Microscope (SEM), an Atomic Force Microscope (AFM) and the Actinic Inspection Tool (AIT) to compare resist images printed with the ASML ADT. The results of the analysis show a good correlation between the mask AFM and the mask SEM measurements, However, the resist printing results for the isolated space patterns are slightly different. The cause ofthis discrepancy may be resist blur, image log slope and SEM image quality and so on. The second topic is an analysis of mask topography using an AFM and relative reflectivity of mirror and absorber surface using the AIT, The AFM data show 6 and 7 angstrom rms roughness for mirror and absorber, respectively. The reflectivity measurements show that the mirror reflects EUV light about 20 times higher than absorber. The last topic is an analysis of a 32nm technology node SRAM cell which includes a comparison of mask SEM image, AIT image, resist image and simulation results. The ADT images of the SRAM pattern were of high quality even though the mask patters were not corrected for OPC or any EUV-specific effects. Image simulation results were in good agreement with the printing results.
Date: June 25, 2009
Creator: Mizuno, H.; McIntyre, G.; Koay, C.-W.; Burkhardt, M.; He, L.; Hartley, J. et al.
Partner: UNT Libraries Government Documents Department

In-Situ TEM Study of Interface Sliding and Migration in an Ultrafine Lamellar Structure

Description: The instability of interfaces in an ultrafine TiAl-({gamma})/Ti{sub 3}Al-({alpha}{sub 2}) lamellar structure by straining at room temperature has been investigated using in-situ straining techniques performed in a transmission electron microscope. The purpose of this study is to obtain experimental evidence to support the creep mechanisms based upon the interface sliding in association with a cooperative movement of interfacial dislocations previously proposed to interpret the nearly linear creep behavior observed from ultrafine lamellar TiAl alloys. The results have revealed that both the sliding and migration of lamellar interfaces can take place simultaneously as a result of the cooperative movement of interfacial dislocations.
Date: December 6, 2005
Creator: Hsiung, L M
Partner: UNT Libraries Government Documents Department

Pu Workshop Letter

Description: In preparation for the upcoming Pu Workshop in Livermore, CA, USA, during July 14 and 15, 2006, we have begun to give some thought as to how the meeting will be structured and what will be discussed. Below, you will find our first proposal as to the agenda and contents of the meeting. From you, we need your feedback and suggestions concerning the desirability of each aspect of our proposal. Hopefully, we will be able to converge to a format that is acceptable to all parties. First, it now appears that we will be limited to three main sessions, Friday morning (July 14), Friday afternoon (July 14) and Saturday morning (July 15). The Pu Futures Meeting will conclude on Thursday, July 13. Following a social excursion, the Russian participants will be transported from Monterey Bay to their hotel in Livermore. We anticipate that the hotel will be the Residence Inn at 1000 Airway Blvd in Livermore. However, the hotel arrangements still need to be confirmed. We expect that many of our participants will begin their travels homeward in the afternoon of Saturday, July 15 and the morning of Sunday, July 16. Associated with the three main sessions, we propose that there be three main topics. Each session will have an individual focus. Because of the limited time available, we will need to make some judicious choices concerning the focus and the speakers for each session. We will also have a poster session associated with each session, to facilitate discussions, and a rotating set of Lab Tours, to maximize participation in the tour and minimize the disruption of the speaking schedule. Presently, we are planning a tour of the Dynamical Transmission Electron Microscope (DTEM) facilities, but this is still in a preliminary stage. We estimate that for each session and topic, ...
Date: March 6, 2006
Creator: Tobin, J G; Schwartz, A J & Fluss, M
Partner: UNT Libraries Government Documents Department

STROBOSCOPIC IMAGE CAPTURE: REDUCING THE DOSE PER FRAME BY AFACTOR OF 30 DOES NOT PREVENT BEAM-INDUCED SPECIMEN MOVEMENT INPARAFFIN

Description: Beam-induced specimen movement may be the major factor that limits the quality of high-resolution images of organic specimens. One of the possible measures to improve the situation that was proposed by Henderson and Glaeser (Henderson and Glaeser, 1985), which we refer to here as 'stroboscopic image capture', is to divide the normal exposure into many successive frames, thus reducing the amount of electron exposure--and possibly the amount of beam-induced movement--per frame. The frames would then be aligned and summed. We have performed preliminary experiments on stroboscopic imaging using a 200-kV electron microscope that was equipped with a high dynamic range CCD camera for image recording and a liquid N{sub 2}-cooled cryoholder. Single-layer paraffin crystals on carbon film were used as a test specimen. The ratio F(g)/F(0) of paraffin reflections, calculated from the images, serves as our criterion for the image quality. In the series that were evaluated, no significant improvement of the F{sub image}(g)/F{sub image}(0) ratio was found, even though the electron exposure per frame was reduced by a factor of 30. A frame-to-frame analysis of image distortions showed that considerable beam-induced movement had still occurred during each frame. In addition, the paraffin crystal lattice was observed to move relative to the supporting carbon film, a fact that cannot be explained as being an electron-optical effect caused by specimen charging. We conclude that a significant further reduction of the dose per frame (than was possible with this CCD detector) will be needed in order to test whether the frame-to-frame changes ultimately become small enough for stroboscopic image capture to show its potential.
Date: August 1, 2006
Creator: Typke, Dieter; Gilpin, Christopher J.; Downing, Kenneth H. & Glaeser, Robert M.
Partner: UNT Libraries Government Documents Department

High Temperature Materials Laboratory Fourteenth Annual Report: October 2000 through September 2001

Description: The HTML User Program continued to work with industrial, academic, and governmental users this year, accepting 92 new projects and developing 48 new user agreements. Table 1 presents the breakdown of these statistics. Figure 1 depicts the continued growth in user agreements and user projects. You will note that the total number of HTML proposals has now exceeded 1000. Also, the large number of new agreements bodes well for the future. At the end of the report, we present a list of proposals to the HTML and a list of agreements between HTML and universities and industries, broken down by state. Program highlights this year included several outstanding user projects (some of which are highlighted in later sections), the annual meeting of the HTML Programs Senior Advisory Committee, and approval by ORNL for the construction of a building to house our new aberration-corrected electron microscope (ACEM) and several other sensitive electron and optical instruments.
Date: May 16, 2002
Creator: Pasto, A.E.
Partner: UNT Libraries Government Documents Department

New instrumentation in Argonne`s HVEM-Tamdem Facility: Expanded capability for in situ ion beam studies

Description: During 1995, a state-of-the-art intermediate voltage electron microscope (IVEM) has been installed in the HVEM-Tandem Facility with in situ ion irradiation capabilities similar to those of the HVEM. A 300 kV Hitachi H-9000NAR has been interfaced to the two ion accelerators of the Facility, with a spatial resolution for imaging which is nearly an order of magnitude better than that for the 1.2 MV HVEM which dates from the early 1970s. The HVEM remains heavily utilized for electron- and ion irradiation-related materials studies, nevertheless, especially those for which less demanding microscopy is adequate. The capabilities and limitations of this IVEM and HVEM are compared. Both the HVEM and IVEM are part of the DOE funded User Facility and therefore are available to the scientific community for materials studies, free of charge for non-proprietary research.
Date: November 1, 1995
Creator: Allen, C.W.; Funk, L.L. & Ryan, E.A.
Partner: UNT Libraries Government Documents Department

Direct observation of threading dislocations in GaN by high-resolution Z-contrast imaging

Description: Wide gap nitride semiconductors have attracted significant attention recently due to their promising performance as short-wavelength light emitting diodes (LEDs) and blue lasers. One interesting issue concerning GaN is that the material is relatively insensitive to the presence of a density of dislocations which is six orders of magnitude higher than that for III-V arsenide and phosphide based LEDs. Although it is well known that these dislocations originate at the film-substrate interface during film growth, thread through the whole epilayer with line direction along <0001> and are perfect dislocations with Burgers vectors of a, c, or c+a, the reason why they have such a small effect on the properties of GaN is unclear. To develop a fundamental understanding of the properties of these dislocations, the core structures are studied here by high resolution Z-contrast imaging in a 300kV VG HB603 scanning transmission electron microscope (STEM) with a resolution of 0.13 nm. As the Z-contrast image is a convolution between the probe intensity profile and the specimen object function, it is possible to obtain more detailed information on the specimen object function, i.e. the structure, through maximum entropy analysis (the maximum entropy technique produces the ``most likely`` object function which is consistent with the image).
Date: February 1, 1998
Creator: Xin, Y.; Browning, N.D.; Sivananthan, S.; Pennycook, S.J.; Nellist, P.D.; FAurie, J.P. et al.
Partner: UNT Libraries Government Documents Department

Formation of Random, RIE-Textured Silicon Surfaces with Reduced Reflection and Enhanced Near IR Absorption

Description: The authors have developed novel metal-assisted texturing processes that have led to optically favorable surfaces for solar cells. Large area ({approximately} 200 cm{sup 2}) uniform texturing has been achieved. The physical dimensions of the chamber limited texturing of even larger wafers. Surface contamination and residual RIE-induced damage were removed by incorporation of a complete RCA clean process followed by wet-chemical etching treatments. RIE-textured solar cells with optimized profiles providing performance comparable to the random, wet-chemically etched cells have been demonstrated. A majority of the texture profiles exhibit an enhanced IQE response in the near IR region.using scanning electron microscope measurements, they carried out a detailed analysis of the microstructure of random RIE-textured surfaces. The random microstructure represents a superposition of sub-{micro}m grating structures with a wide distribution of periods, depths, and profiles as determined by the SEM measurements. These structures were modeled using GSOLVER{trademark} software for periodic patterns. The enhanced IR response from random, RIE-textured surfaces is attributed to enhanced coupling of light into the transmitted diffraction orders. These obliquely propagating diffraction orders generate electron-hole pairs closer to the surface, thus, reducing bulk recombination losses relative to a non-scattering, planar surface with identical hemispherical reflection. The optimized texture and damage removal processes have been applied to large area (100--132 cm{sup 2}) multi-crystalline wafers. initial results have demonstrated improved performance relative to planar, control wafers. However, the texture and solar cell fabrication processes require further optimization in the RCA clean, DRE treatments, and emitter formation in order to fully realize the benefits of the low-reflection ({approximately}1-2%) textured surfaces.
Date: April 1, 2001
Creator: ZAIDI, SALEEM H
Partner: UNT Libraries Government Documents Department

USING A MULTI-DISCIPLINARY APPROACH, THE FIRST ELECTRON BACKSCATTERED KIKUCHI PATTERNS WERE CAPTURES FOR A PU ALLOY

Description: Microstructural characterization of plutonium by electron backscattered diffraction (EBSD) has been previously elusive primarily because of the extreme toxicity and surface oxidation rates associated with plutonium metal. In this work, initial electron backscattered diffraction pattern (EBSP) observations of a plutonium-gallium (Pu-Ga) alloy were made. Samples were prepared using standard metallographic and electropolishing techniques that were performed inside gloveboxes and/or an open front hood to prevent spread of radioactive contamination. A scanning Auger microprobe (SAM), equipped with an ion-gun, was used to characterize and remove surface chemical impurities (in particular carbon (C) and oxygen (O)) and a specially designed vacuum transfer device was used to minimize oxidation during the sample transfer from the SAM to the scanning electron microscope (SEM). EBSD patterns of the {delta}-phase (face-centered-cubic) were captured and the experimental techniques and parameters used to perform EBSD characterization are described in detail.
Date: June 1, 2001
Creator: BOEHLERT, C. J.
Partner: UNT Libraries Government Documents Department

Scanning probe microscopy competency development

Description: This is the final report of a three-year, Laboratory Directed Research and Development (LDRD) project at Los Alamos National Laboratory (LANL). The project collaborators developed an ultra-high vacuum scanning tunneling microscope (UHV-STM) capability, integrated it with existing scanning probe microscopes, and developed new, advanced air-based scanning force techniques (SPMs). Programmatic, basic, and industrially related laboratory research requires the existence of SPMs, as well as expertise capable of providing local nano-scale information. The UHV-STM capability, equipped with load-lock system and several surface science techniques, will allow introduction, examination, and reaction of surfaces prepared under well-controlled vacuum conditions, including the examination of morphology and local bonding associated with the initial stages of film growth under controlled growth conditions. The resulting capabilities will enable the authors to respond to a variety of problems requiring local characterization of conducting and nonconducting surfaces in liquids, air, and UHV.
Date: December 31, 1998
Creator: Hawley, M.E.; Reagor, D.W. & Jia, Quan Xi
Partner: UNT Libraries Government Documents Department

A combined experimental and theoretical approach to atomic scale characterization

Description: Recently, the scanning transmission electron microscope has become capable of forming electron probes of atomic dimensions. Through the technique of Z-contrast imaging, it is now possible to form atomic resolution images with high compositional sensitivity from which atomic column positions can be directly determined. An incoherent image of this nature also allows atomic resolution chemical analysis to be performed, by locating the probe over particular columns or planes seen in the image while electron energy loss spectra are collected. Such data represents either an ideal starting point for first principles theoretical calculations or a test of theoretical predictions. The authors present several examples where theory and experiment together give a very complete and often surprising atomic scale view of complex materials.
Date: February 1, 1998
Creator: Pennycook, S.J.; Chisholm, M.F.; Yan, Y.; Duscher, G. & Pantelides, S.T.
Partner: UNT Libraries Government Documents Department

Composite electrodes for lithium batteries.

Description: The stability of composite positive and negative electrodes for rechargeable lithium batteries is discussed. Positive electrodes with spinel-type structures that are derived from orthorhombic-LiMnO{sub 2} and layered-MnO{sub 2} are significantly more stable than standard spinel Li[Mn{sub 2}]O{sub 4} electrodes when cycled electrochemically over both the 4-V and 3-V plateaus in lithium cells. Transmission electron microscope data of cycled electrodes have indicated that a composite domain structure accounts for this greater electrochemical stability. The performance of composite Cu{sub x}Sn materials as alternative negative electrodes to amorphous SnO{sub x} electrodes for lithium-ion batteries is discussed in terms of the importance of the concentration of the electrochemically inactive copper component in the electrode.
Date: February 3, 1999
Creator: Hackney, S. A.; Johnson, C. S.; Kahaian, A. J.; Kepler, K. D.; Shao-Horn, Y.; Thackeray, M. M. et al.
Partner: UNT Libraries Government Documents Department

Energy Resolved High Resolution Dynamic E-Cell Materials Research. Final Report

Description: The purpose of this project was to develop in situ materials reaction observation capability in an intermediate voltage high resolution transmission electron microscope. To accomplish this we purchased a GATAN imaging energy filter system, a hot stage, and designed and constructed an environmental cell and real time television image recording system, and installed this equipment on our EM 430 intermediate voltage electron microscope.
Date: May 16, 2000
Creator: Carpenter, Ray; Sharma, Renu & Mayer, James
Partner: UNT Libraries Government Documents Department