Thermal conductivity measurements of Summit polycrystalline silicon.
Description:
A capability for measuring the thermal conductivity of microelectromechanical systems (MEMS) materials using a steady state resistance technique was developed and used to measure the thermal conductivities of SUMMiT{trademark} V layers. Thermal conductivities were measured over two temperature ranges: 100K to 350K and 293K to 575K in order to generate two data sets. The steady state resistance technique uses surface micromachined bridge structures fabricated using the standard SUMMiT fabricatio…
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Date:
November 1, 2006
Creator:
Clemens, Rebecca; Kuppers, Jaron D. & Phinney, Leslie Mary
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Partner:
UNT Libraries Government Documents Department