HRTEM image simulations of structural defects in gate oxides
Description:
We have performed high-resolution transmission electron microscope image simulations to assess the visibility of various structural defects in gate oxides at electron microscope resolutions.
Date:
February 10, 2000
Creator:
Taylor, Seth; Mardinly, John; O'Keefe, Michael A. & Gronsky, R.
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UNT Libraries Government Documents Department