Description: Transmission electron microscopy was used to study amorphized implanted ..cap alpha..-Al/sub 2/O/sub 3/. The response of the as-implanted amorphous layer to thermal aging varied with annealing tmperature and time. The recrystallization is total and epitaxial at 1190/sup 0/C. (DLC)
Date: January 1, 1986
Creator: Sklad, P.S.
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