Rapid thermal processing of high-efficiency silicon solar cells with controlled in-situ annealing
Description:
Silicon solar cell efficiencies of 17.1%, 16.4%, 14.8%, and 14.9% have been achieved on FZ, Cz, multicrystalline (mc-Si), and dendritic web (DW) silicon, respectively, using simplified, cost-effective rapid thermal processing (RTP). These represent the highest reported efficiencies for solar cells processed with simultaneous front and back diffusion with no conventional high-temperature furnace steps. Appropriate diffusion temperature coupled with the added in-situ anneal resulted in suitable m…
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Date:
January 1, 1995
Creator:
Doshi, P.; Rohatgi, A.; Ropp, M.; Chen, Z.; Ruby, D. & Meier, D. L.
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