Experimental process system development unit for producing semiconductor-grade silicon using the silane-to-silicon process. Quarterly progress report, October-December 1979
Description:
This program consists of the engineering design, fabrication, assembly, operation, economic analysis, and process support R and D for an Experimental Process System Development Unit (EPSDU). EPSDU equipment specification, vendor development, and evaluation of quotations represent a significant effort which will permit the start of ordering EPSDU equipment during the next quarter. Initial mini-burner test results are encouraging. It appears that a fairly simple and cost-effective waste treatment…
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Date:
January 1, 1979
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