Progress in Short Period Multilayer Coatings for Water Window Applications
Description:
Absolute photoionization cross-section measurements for amixture of ground and metastable states of Xe4+, Xe5+, and Xe6+ arereported in the photon energy range of 4d-nf transitions, which occurwithin or adjacent to the 13.5 nm window for extreme ultravioletlithography light source development. The reported values allow thequantification of opacity effects in xenon plasmas due to these 4d-4fautoionizing states. The oscillator strengths for the 4d-4f and 4d-5ftransitions in Xeq+ (q=1-6) ions are …
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Date:
May 20, 2006
Creator:
Gullikson, E. M.; Salmassi, F.; Aquila, A. L. & Dollar, F.
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UNT Libraries Government Documents Department