High-Transparency Sputtered In2O3 and ITO Films Containing Zirconium
Description:
Our recent investigations have identified a method to produce ITO-like films that are less sensitive to variations in the oxygen-containing deposition ambient. Specifically, we are studying the effect of adding small amounts of Zr to both In2O3 and ITO ceramic sputtering targets.
Date:
October 1, 2007
Creator:
Gessert, T. A.; Yoshida, Y.; Fesenmaier, C. C. & Coutts, T. J.
Item Type:
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Presentation
Partner:
UNT Libraries Government Documents Department