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Micrometer-Scale Machining of Metals and Polymers Enabled by Focused Ion Beam Sputtering

Description: This work combines focused ion beam sputtering and ultra-precision machining for microfabrication of metal alloys and polymers. Specifically, micro-end mills are made by Ga ion beam sputtering of a cylindrical tool shank. Using an ion energy of 20keV, the focused beam defines the tool cutting edges that have submicrometer radii of curvature. We demonstrate 25 {micro}m diameter micromilling tools having 2, 4 and 5 cutting edges. These tools fabricate fine channels, 26-28 microns wide, in 6061 aluminum, brass, and polymethyl methacrylate. Micro-tools are structurally robust and operate for more than 5 hours without fracture.
Date: December 22, 1998
Creator: Adams, D.P.; Benavides, G.L. & Vasile, M.J.
Partner: UNT Libraries Government Documents Department

Ion Beam Sputter Fabrication of Micro-Grooving and Micro-Threading Tools

Description: This paper presents techniques for fabricating microscopic, nonplanar features in a variety of materials. Micro-grooving and micro-threading tools having cutting dimensions of 10-30{micro}m are made by focused ion beam sputtering and used in ultra-precision machining. Tool fabrication involves directing a 20 keV gallium beam at polished cylindrical punches made of cobalt M42 high-speed steel or C2 tungsten carbide. This creates cutting edges having radii of curvature less than 0.4 {micro}m, and rake features similar to conventional lathe tools. Clearance for minimizing frictional drag of a tool results from the sputter yield dependence on ion herd target incidence angle. Numerically controlled, ultra-precision machining with micro-grooving tools results in a close matching between tool width and feature size. Microtools controllably machine 13 {micro}m wide, 4 {micro}m deep, helical grooves in polymethyl methacrylate and 6061-T6 Al cylindrical substrates. Micro-grooving tools also fabricate sinusoidal waveform features in polished metal substrates.
Date: November 5, 1999
Creator: ADAMS,DAVID P.; VASILE,M.J. & KRISHNAN,A.S.M.
Partner: UNT Libraries Government Documents Department

Micromilling of Metal Alloys with Focused Ion Beam-Fabricated Tools

Description: This work combines focused ion beam sputtering and ultra-precision machining as a first step in fabricating microstructure in metals and alloys. Specifically, {approx}25{micro}m diameter micro-end mills are made from cobalt M42 high-speed steel and C2 micrograin tungsten carbide tool blanks by ion beam sputtering. A 20 keV focused gallium beam defines tool cutting edges having radii of curvature < 0.1{micro}m. Micro-end mills having 2, 4 and 5 cutting edges successfully machine small trenches in 6061-T4 aluminum, brass, 4340 steel and polymethyl methacrylate. Machined trench widths are approximately equal to the tool diameters and surface roughnesses (rms) are {approx}150 nm or less. Microtools are robust and operate for more than 6 hours without fracture. Results from ultra-precision machining aluminum at feed rates as high as 50 mm/minute are included.
Date: November 5, 1999
Creator: ADAMS,DAVID P.; VASILE,M.J.; BENAVIDES,GILBERT L. & CAMPBELL,ANN N.
Partner: UNT Libraries Government Documents Department