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A low power, tight seal, polyimide electrostatic microvalve

Description: An electrostatically-actuated polyimide microvalve is developed with sub-micron gaps between the electrodes to provide high force with low power consumption (< 1 mW). Built-in residual stress results in a curled bimorph cantilever which allows for a n-Licroactuator with large displacement. This microactuator is used to open and close a fluid path hole etched in silicon for a microvalve. The microactuator can be actuated with 25V for a displacement of 200 {mu}m. The cantilever actuator is mainly composed of polyimide, which is flexible enough to conform over the flow hole, thereby eliminating the need for the design of a valve seat.
Date: April 17, 1996
Creator: Lee, A.P.; Hamilton, J. & Trevino, J.
Partner: UNT Libraries Government Documents Department

Thin film conductive polymer for microactuator and micromuscle applications

Description: Conductive polymer/polyimide bimorphic microcantilevers have been actuated vertically (out-of-plane) upon the volumetric changes induced by electrochemical doping of the polymer. The microcantilevers that are 200-500 {mu}m in length and 50-100 {mu}m in width can be fully extended from a circularly-curled geometry, and thus generate more than 100 {mu}m displacement. Dynamically the microcantilevers have been driven as fast as 1.2 Hz and the polymer was stable for over a week stored in air and light. Residual stresses in the polymer film is estimated to be as high as 254 MPa, and actuation stresses are as high as 50 MPa.
Date: April 14, 1994
Creator: Lee, A.P.; Hong, K.; Trevino, J. & Northrup, M.A.
Partner: UNT Libraries Government Documents Department

Sensor modules for wireless distributed sensor networks

Description: A national security need as well as environmental monitoring need exists for networks of sensors. The advantages of a network of sensors over a single sensor are improved range, sensitivity, directionality, and data readability. Depending upon the particular application, sensors can be acoustic, chemical, biological, thermal or inertial. A major desire in these sensor networks is to have the individual sensor and associated electronics small and low enough in power that the battery can also be small and of long life. Smaller, low power sensor nodes can allow more nodes per network. A typical network for security applications is depicted in Figure 1. Here a number of sensor nodes are deployed around a central hub node in a star configuration. In this scenario the hubs communicate with each other and ultimately relay information to a satellite. Future networks might follow this scenario or some other network architecture such as a hopping network where individual nodes communicate directly with each other. The focus of our research has been on development of the small low power nodes and less on the overall network topology. However, some consideration of the network must be given when designing the nodes and some consideration of the nodes must be given when designing the network. An individual sensor node contains not only the sensor but also the sensor interface electronics, analog to digital (A/D) converter, logic, RF communication link, antenna, and the battery. Future nodes will also contain some form of signal processing to allow more sophisticated network architectures. The FY98 goal for this project was to make a sensor node with a physical form factor of a 2 inch x 2 inch x 2 inch cube.
Date: February 22, 1999
Creator: Lee, A P; McConaghy, C F; Simon, J N; Benett, W; Jones, L & Trevino, J
Partner: UNT Libraries Government Documents Department