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in creator/contributor: "Sniegowski, Jeffry J."  
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Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process

Description: A microengine uses two synchronized linear actuators as a power source and converts oscillatory motion from the actuators into rotational motion via direct linkage connection to an output gear or wheel. The microengine provides output in the form of a continuously rotating output gear that is capable of delivering drive torque to a micromechanism. The microengine can be operated at varying speeds and its motion can be reversed. Linear actuators are synchronized in order to provide linear oscill… more
Date: December 31, 1994
Creator: Garcia, Ernest J. & Sniegowski, Jeffry J.
Item Type: Refine your search to only Patent
Partner: UNT Libraries Government Documents Department
open access

A Low-Voltage Rotary Actuator Fabricated Using a Five-Level Polysilicon Surface Micromachining Technology

Description: The design, fabrication and characterization of a low-voltage rotary stepper motor are presented in this work. Using a five-level polysilicon MEMS technology, steps were taken to increase the capacitance over previous stepper motor designs to generate high torque at low voltages. A low-friction hub was developed to minimize frictional loads due to rubbing surfaces, producing an estimated resistive torque of about 6 pN-m. This design also allowed investigations into the potential benefit of usin… more
Date: September 22, 1999
Creator: Jakubczak, Jerome F., II; Krygowski, Thomas W.; Miller, Samuel L.; Rodgers, M. Steven & Sniegowski, Jeffry J.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

Chemical vapor deposition coating for micromachines

Description: Two major problems associated with Si-based MEMS devices are stiction and wear. Surface modifications are needed to reduce both adhesion and friction in micromechanical structures to solve these problems. In this paper, the authors will present a process used to selectively coat MEMS devices with tungsten using a CVD (Chemical Vapor Deposition) process. The selective W deposition process results in a very conformal coating and can potentially solve both stiction and wear problems confronting ME… more
Date: April 21, 2000
Creator: Mani, Seethambal S.; Fleming, James G.; Sniegowski, Jeffry J.; DE BOER,MAARTEN P.; Irwin, Lawrence W.; Walraven, Jeremy A. et al.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

Integration of optoelectronics and MEMS by free-space micro-optics

Description: This report represents the completion of a three-year Laboratory-Directed Research and Development (LDRD) program to investigate combining microelectromechanical systems (MEMS) with optoelectronic components as a means of realizing compact optomechanical subsystems. Some examples of possible applications are laser beam scanning, switching and routing and active focusing, spectral filtering or shattering of optical sources. The two technologies use dissimilar materials with significant compatibi… more
Date: June 1, 2000
Creator: Warren, Mial E.; Spahn, Olga B.; Sweatt, William C.; Shul, Randy J.; Wendt, Joel R.; Vawter, Gregory A. et al.
Item Type: Refine your search to only Report
Partner: UNT Libraries Government Documents Department
open access

High Amplitude Secondary Mass Drive

Description: In this paper we describe a high amplitude electrostatic drive for surface micromachined mechanical oscillators that may be suitable for vibratory gyroscopes. It is an advanced design of a previously reported dual mass oscillator (Dyck, et. al., 1999). The structure is a 2 degree-of-freedom, parallel-plate driven motion amplifier, termed the secondary mass drive oscillator (SMD oscillator). During each cycle the device contacts the drive plates, generating large electrostatic forces. Peak-to-pe… more
Date: July 6, 2000
Creator: DYCK,CHRISTOPHER WILLIAM; ALLEN,JAMES J.; HUBER,ROBERT JOHN & SNIEGOWSKI,JEFFRY J.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

Effect of W coating on microengine performance

Description: Two major problems associated with Si-based MEMS (MicroElectroMechanical Systems) devices are stiction and wear. Surface modifications are needed to reduce both adhesion and friction in micromechanical structures to solve these problems. In this paper, the authors present a CVD (Chemical Vapor Deposition) process that selectively coats MEMS devices with tungsten and significantly enhances device durability. Tungsten CVD is used in the integrated-circuit industry, which makes this approach manuf… more
Date: March 1, 2000
Creator: Mani, Seethambal S.; Fleming, James G.; Walraven, Jeremy A.; Sniegowski, Jeffry J.; De Boer, Maarten P.; Irwin, Lloyd W. et al.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

Fundamental mechanisms of micromachine reliability

Description: Due to extreme surface to volume ratios, adhesion and friction are critical properties for reliability of Microelectromechanical Systems (MEMS), but are not well understood. In this LDRD the authors established test structures, metrology and numerical modeling to conduct studies on adhesion and friction in MEMS. They then concentrated on measuring the effect of environment on MEMS adhesion. Polycrystalline silicon (polysilicon) is the primary material of interest in MEMS because of its integrat… more
Date: January 1, 2000
Creator: DE BOER,MAARTEN P.; SNIEGOWSKI,JEFFRY J.; KNAPP,JAMES A.; REDMOND,JAMES M.; MICHALSKE,TERRY A. & MAYER,THOMAS K.
Item Type: Refine your search to only Report
Partner: UNT Libraries Government Documents Department
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