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Characterization of electrical linewidth test structures patterned in (100) Silicon-on-Insulator for use as CD standards

Description: This paper describes the fabrication and measurement of the linewidths of the reference segments of cross-bridge resistors patterned in (100) Bonded and Etched Back Silicon-on-Insulator (BESOI) material. The critical dimensions (CD) of the reference segments of a selection of the cross-bridge resistor test structures were measured both electrically and by Scanning-Electron Microscopy (SEM) cross-section imaging. The reference-segment features were aligned with <110> directions in the BESO… more
Date: February 29, 2000
Creator: Cresswell, M. W.; Allen, R. A.; Ghoshtagore, R. N.; Guillaume, N. M. P.; Shea, Patrick J.; Everist, Sarah C. et al.
Partner: UNT Libraries Government Documents Department
open access

Comparison of electrical CD measurements and cross-section lattice-plane counts of sub-micrometer features replicated in Silicon-on-Insulator materials

Description: Electrical test structures of the type known as cross-bridge resistors have been patterned in (100) epitaxial silicon material that was grown on Bonded and Etched-Back Silicon-on-Insulator (BESOI) substrates. The CDs (Critical Dimensions) of a selection of their reference segments have been measured electrically, by SEM (Scanning-Electron Microscopy) cross-section imaging, and by lattice-plane counting. The lattice-plane counting is performed on phase-contrast images made by High-Resolution Tra… more
Date: February 29, 2000
Creator: Cresswell, Michael W.; Bonevich, John E.; Headley, Thomas J.; Allen, Richard A.; Giannuzzi, Lucille A.; Everist, Sarah C. et al.
Partner: UNT Libraries Government Documents Department
open access

SERDP ER-1376 Enhancement of In Situ Bioremediation of Energetic Compounds by Coupled Abiotic/Biotic Processes:Final Report for 2004 - 2006

Description: This project was initiated by SERDP to quantify processes and determine the effectiveness of abiotic/biotic mineralization of energetics (RDX, HMX, TNT) in aquifer sediments by combinations of biostimulation (carbon, trace nutrient additions) and chemical reduction of sediment to create a reducing environment. Initially it was hypothesized that a balance of chemical reduction of sediment and biostimulation would increase the RDX, HMX, and TNT mineralization rate significantly (by a combination … more
Date: August 7, 2007
Creator: Szecsody, James E.; Comfort, Steve; Fredrickson, Herbert L.; Boparai, Hardiljeet K.; Devary, Brooks J.; Thompson, Karen T. et al.
Partner: UNT Libraries Government Documents Department
open access

Chaos and collective relaxation in galaxies and charged-particle beams

Description: Both galaxies and charged particle beams can exhibit collective relaxation on surprisingly short time scales. This can be attributed to the effects of chaos, often triggered by resonances caused by time-dependences in the bulk potential, which act almost identically for attractive gravitational and repulsive electrostatic forces. These similarities suggest that many physical processes at work in galaxies, albeit not subject to direct controlled experiments, can be tested indirectly using facili… more
Date: January 1, 2003
Creator: Bohn, Courtlandt; U., /Fermilab /Northern Illinois; Kandrup, Henry E.; U., /Florida; Kishek, Rami A.; O'Shea, Patrick G. et al.
Partner: UNT Libraries Government Documents Department
open access

Experiments in Sideband Suppression on the Los Alamos National Laboratory Free-Electron Laser

Description: Two versions of the ``Phase-Step Mirror`` (PSM), a novel optical component that prevents the formation of sidebands in a Free-Electron Laser (FEL) were tested on the Los Alamos National Laboratory (LANL) APEX FEL. Sideband suppression and frequency control with high extraction efficiency and single line, transform limited operation were demonstrated. The results of our LANL experiments and computer simulations showed that for very high gain applications, the first-order sideband is completely s… more
Date: June 1, 1993
Creator: White, Cheryl J.; Coyle, Matthew R.; Paxton, Alan H.; O`Shea, Patrick G.; Bender, Stephen C.; Byrd, Donald A. et al.
Partner: UNT Libraries Government Documents Department
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