Description: This paper reports on the design and fabrication of a new milliscale magnetic actuator that is ideally suited for LIGA processing. LIGA processing permits the fabrication of millisized machine elements that cannot be fabricated by conventional miniature machining techniques because of their small feature sizes. The Milliengine is a magnetically driven device that utilizes a unique design to extend the 2-dimensional fabrication capability of LIGA to create 3-dimensional machinery.
Date: April 1, 1997
Creator: Garcia, E.J.; Christenson, T.R.; Polosky, M.A. & Jojola, A.A.
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