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Thermal and mechanical joints to cryo-cooled silicon monochromatorcrystals

Description: We describe the performance of various materials used as thethermal interface between silicon to silicon and silicon to copper jointswhen operated at ~;120K and loaded with ~;20 watts of thermal power. Wefind that only the indium based silicon-to-silicon joint isreliable.
Date: July 14, 2006
Creator: MacDowell, A.; Fakra, S. & Morrison, G.
Partner: UNT Libraries Government Documents Department

Progress towards sub-micron hard x-ray imaging using elliptically bent mirrors

Description: Of the many methods used to focus x-rays, the use of mirrors with an elliptical curvature shows the most promise of providing a sub-micron white light focus. Our group has been developing the techniques of controlled bending of mirror substrates in order to produce the desired elliptical shape. We have been successful in producing surfaces with the required microradian slope error tolerances. Details of the bending techniques used, results from laboratory slope error measurements using a Long Trace Profiler (LTP) and data from the measurement of focus shape using knife edge and imaging methods using x-rays in the 5-12 KeV energy range are presented. The development of a white light focusing opens many possibilities in diffraction and spectroscopic studies.
Date: July 1, 1997
Creator: MacDowell, A.A.; Celestre, R.; Chang, C.H. & Frank, K.
Partner: UNT Libraries Government Documents Department

Synchrotron radiation sources and condensers for projection x-ray lithography

Description: The design requirements for a compact electron storage ring that could be used as a soft x-ray source for projection lithography are discussed. The design concepts of the x-ray optics that are required to collect and condition the radiation in divergence, uniformity and direction to properly illuminate the mask and the particular x-ray projection camera used are discussed. Preliminary designs for an entire soft x-ray projection lithography system using an electron storage ring as a soft X-ray source are presented. It is shown that by combining the existing technology of storage rings with large collection angle condensers, a powerful and reliable source of 130{Angstrom} photons for production line projection x-ray lithography is possible.
Date: November 1, 1992
Creator: Murphy, J. B.; MacDowell, A. A.; White, D. L. & Wood, O. R. II
Partner: UNT Libraries Government Documents Department

A Superbend X-Ray Microdiffraction Beamline at the Advanced Light Source

Description: Beamline 12.3.2 at the Advanced Light Source is a newly commissioned beamline dedicated to x-ray microdiffraction. It operates in both monochromatic and polychromatic radiation mode. The facility uses a superconducting bending magnet source to deliver an X-ray spectrum ranging from 5 to 22 keV. The beam is focused down to {approx} 1 um size at the sample position using a pair of elliptically bent Kirkpatrick-Baez mirrors enclosed in a vacuum box. The sample placed on high precision stages can be raster-scanned under the microbeam while a diffraction pattern is taken at each step. The arrays of diffraction patterns are then analyzed to derive distribution maps of phases, strain/stress and/or plastic deformation inside the sample.
Date: March 10, 2009
Creator: Tamura, N.; Kunz, M.; Chen, K.; Celestre, R.S.; MacDowell, A.A. & Warwick, T.
Partner: UNT Libraries Government Documents Department

AIR CONVECTION NOISE OF PENCIL-BEAM INTERFERMETER FOR LONG TRACE PROFILER.

Description: In this work, we investigate the effect of air convection on laser-beam pointing noise essential for the long trace profiler (LTP). We describe this pointing error with noise power density (NPD) frequency distributions. It is shown that the NPD spectra due to air convection have a very characteristic form. In the range of frequencies from {approx}0.05 Hz to {approx}0.5 Hz, the spectra can be modeled with an inverse-power-law function. Depending on the intensity of air convection that is controlled with a resistive heater of 100 to 150 mW along a one-meter-long optical path, the power index lies between 2 and 3 at an overall rms noise of {approx}0.5 to 1 microradian. The efficiency of suppression of the convection noise by blowing air across the beam optical path is also discussed. Air-blowing leads to a white-noise-like spectrum. Air blowing was applied to the reference channel of an LTP allowing demonstration of the contribution of air convection noise to the LTP reference beam. The ability to change (with the blowing technique presented) the spectral characteristics of the beam pointing noise due to air convection allows one to investigate the contribution of the convection effect, and thus make corrections to the power spectral density spectra measured with the LTP.
Date: August 14, 2006
Creator: YASHCHUK, V.V.; IRICK, S.C.; MACDOWELL, A.A.; MCKINNEY, W.R. & TAKACS, P.Z.
Partner: UNT Libraries Government Documents Department

Characterizing the nano and micro structure of concrete to improve its durability

Description: New and advanced methodologies have been developed to characterize the nano and microstructure of cement paste and concrete exposed to aggressive environments. High resolution full-field soft X-ray imaging in the water window is providing new insight on the nano scale of the cement hydration process, which leads to a nano-optimization of cement-based systems. Hard X-ray microtomography images on ice inside cement paste and cracking caused by the alkali-silica reaction (ASR) enables three-dimensional structural identification. The potential of neutron diffraction to determine reactive aggregates by measuring their residual strains and preferred orientation is studied. Results of experiments using these tools will be shown on this paper.
Date: October 22, 2008
Creator: Monteiro, P. J. M.; Kirchheim, A. P.; Chae, S.; Fischer, P.; MacDowell, A. A.; Schaible, E. et al.
Partner: UNT Libraries Government Documents Department

Grain orientation mapping of passivated aluminum interconnect lines with X-ray micro-diffraction

Description: A micro x-ray diffraction facility is under development at the Advanced Light Source. Spot sizes are typically about 1-{micro}m size generated by means of grazing incidence Kirkpatrick-Baez focusing mirrors. Photon energy is either white of energy range 6--14 keV or monochromatic generated from a pair of channel cut crystals. Laue diffraction pattern from a single grain in a passivated 2-{micro}m wide bamboo structured Aluminum interconnect line has been recorded. Acquisition times are of the order of seconds. The Laue pattern has allowed the determination of the crystallographic orientation of individual grains along the line length. The experimental and analysis procedure used is described, as is the latest grain orientation result. The impact of x-ray micro-diffraction and its possible future direction are discussed in the context of other developments in the area of electromigration, and other technological problems.
Date: September 1998
Creator: Chang, C. H.; Patel, J. R.; MacDowell, A. A.; Padmore, H. A. & Thompson, A. C.
Partner: UNT Libraries Government Documents Department

Progress towards sub-micron hard x-ray imaging using elliptically bent mirrors and its applications

Description: The authors have developed an x-ray micro-probe facility utilizing mirror bending techniques that allow white light x-rays (4--12keV) from the Advanced light Source Synchrotron to be focused down to spot sizes of micron spatial dimensions. They have installed a 4 crystal monochromator prior to the micro-focusing mirrors. The monochromator is designed such that it can move out of the way of the input beam, and allows the same micron sized sample to be illuminated with either white or monochromatic radiation. Illumination of the sample with white light allows for elemental mapping and Laue x-ray diffraction, while illumination of the sample with monochromatic light allows for elemental mapping (with reduced background), micro-X-ray absorption spectroscopy and micro-diffraction. The performance of the system will be described as will some of the initial experiments that cover the various disciplines of Earth, Material and Life Sciences.
Date: June 1998
Creator: MacDowell, A. A.; Lamble, G. M.; Celestre, R. S.; Padmore, H. A.; Chang, C. H. & Patel, J. R.
Partner: UNT Libraries Government Documents Department

Grain orientation mapping of passivated aluminum interconnect wires with X-ray micro-diffraction

Description: A micro x-ray diffraction facility is under development at the Advanced Light source. Spot sizes are typically about 1-{micro}m size generated by means of grazing incidence Kirkpatrick-Baez focusing mirrors. Photon energy is either white of energy range 6--14 keV or monochromatic generated from a pair of channel cut crystals. A Laue diffraction pattern from a single grain in passivated 2-{micro}m wide bamboo structured Aluminum interconnect line has been recorded. Acquisition times are of the order of a few seconds. The Laue pattern has allowed the determination of the crystallographic orientation of individual grains along the line length. The experimental and analysis procedures used are described, as is a grain orientation result. The future direction of this program is discussed in the context of strain measurements in the area of electromigration.
Date: June 1998
Creator: MacDowell, A. A.; Padmore, H. A.; Thompson, A. C.; Chang, C. H. & Patel, J. R.
Partner: UNT Libraries Government Documents Department

Tomographic Imaging of Water Injection and Withdrawal in PEMFC Gas Diffusion Layers

Description: X-ray computed tomography was used to visualize the water configurations inside gas diffusion layers for various applied capillary pressures, corresponding to both water invasion and withdrawal. A specialized sample holder was developed to allow capillary pressure control on the small-scale samples required. Tests were performed on GDL specimens with and without hydrophobic treatments.
Date: June 25, 2010
Creator: McGill University
Partner: UNT Libraries Government Documents Department

Grain orientation measurement of passivated aluminum interconnectsby x-ray micro diffraction

Description: The crystallographic orientations of individual grains in apassivated aluminum interconnect line of 0.7-mu m width were investigatedby using an incidentwhite x-ray microbeam at the Advanced Light Source,Berkeley National Laboratory. Intergrain orientation mapping was obtainedwith about 0.05o sensitivity by the micro Laue diffractiontechnique.
Date: July 1, 1999
Creator: Chang, Chang-Hwan; Valek, B.C.; Padmore,H.A.; MacDowell, A.A.; Celestre, R.; Marieb, T. et al.
Partner: UNT Libraries Government Documents Department

Grain orientation and strain measurements in sub-micron wide passivated individual aluminum test structures

Description: An X-ray microdiffraction dedicated beamline, combining white and monochromatic beam capabilities, has been built at the Advanced Light Source. The purpose of this beamline is to address the myriad of problems in Materials Science and Physics that require submicron x-ray beams for structural characterization. Many such problems are found in the general area of thin films and nano-materials. For instance, the ability to characterize the orientation and strain state in individual grains of thin films allows us to measure structural changes at a very local level. These microstructural changes are influenced heavily by such parameters as deposition conditions and subsequent treatment. The accurate measurement of strain gradients at the micron and sub-micron level finds many applications ranging from the strain state under nano-indenters to gradients at crack tips. Undoubtedly many other applications will unfold in the future as we gain experience with the capabilities and limitations of this instrument. We have applied this technique to measure grain orientation and residual stress in single grains of pure Al interconnect lines and preliminary results on post-electromigration test experiments are presented. It is shown that measurements with this instrument can be used to resolve the complete stress tensor (6 components) in a submicron volume inside a single grain of Al under a passivation layer with an overall precision of about 20 MPa. The microstructure of passivated lines appears to be complex, with grains divided into identifiable subgrains and noticeable local variations of both tensile/compressive and shear stresses within single grains.
Date: March 1, 2001
Creator: Tamura, N.; Valek, B.C.; Spolenak, R.; MacDowell, A.A.; Celestre, R.S.; Padmore, H.A. et al.
Partner: UNT Libraries Government Documents Department

Imaging spectroscopic analysis at the Advanced Light Source

Description: One of the major advances at the high brightness third generation synchrotrons is the dramatic improvement of imaging capability. There is a large multi-disciplinary effort underway at the ALS to develop imaging X-ray, UV and Infra-red spectroscopic analysis on a spatial scale from. a few microns to 10nm. These developments make use of light that varies in energy from 6meV to 15KeV. Imaging and spectroscopy are finding applications in surface science, bulk materials analysis, semiconductor structures, particulate contaminants, magnetic thin films, biology and environmental science. This article is an overview and status report from the developers of some of these techniques at the ALS. The following table lists all the currently available microscopes at the. ALS. This article will describe some of the microscopes and some of the early applications.
Date: May 12, 1999
Creator: MacDowell, A. A.; Warwick, T.; Anders, S.; Lamble, G.M.; Martin, M.C.; McKinney, W.R. et al.
Partner: UNT Libraries Government Documents Department

Scanning x-ray microdiffraction with submicron white beam for strain and orientation mapping in thin films

Description: Scanning X-ray Microdiffraction (m-SXRD) combines the use of high brilliance synchrotron sources with the latest achromatic X-ray focusing optics and fast large area 2D-detector technology. Using white beams or a combination of white and monochromatic beams, it allows for orientation and strain/stress mapping of polycrystalline thin films with submicron spatial resolution. The technique is described in detail as applied to the study of thin aluminium and copper blanket films and lines following electromigration testing and/or thermal cycling experiments. It is shown that there are significant orientation and strain/stress variations between grains and inside individual grains. A polycrystalline film when investigated at the granular (micron) level shows a highly mechanically inhomogeneous medium that allows insight into its mesoscopic properties. If the m-SXRD data are averaged over a macroscopic range, results show good agreement with direct macroscopic texture and stress measurements .
Date: January 14, 2003
Creator: Tamura, N.; MacDowell, A.A.; Spolenak, R.; Valek, B.C.; Bravman, J.C.; Brown, W.L. et al.
Partner: UNT Libraries Government Documents Department

Structure and kinetics of Sn whisker growth on Pb-free solder finish

Description: Standard Leadframes used in surface mount technology are finished with a layer of eutectic SnPb for passivation and for enhancing solder wetting during reflow. When eutectic SnPb is replaced by Pb-free solder, especially the eutectic SnCu, a large number of Sn whiskers are found on the Pb-free finish. Some of the whiskers are long enough to become shorts between the neighboring legs of the leadframe. How to suppress their growth and how to perform accelerated test of Sn whisker growth are crucial reliability issues in the electronic packaging industry. In this paper, we report the study of spontaneous Sn whisker growth at room temperature on eutectic SnCu and pure Sn finishes. Both compressive stress and surface oxide on Sn are necessary conditions for whisker growth. Structure and stress analyses by using the micro-diffraction in synchrotron radiation are reported. Cross-sectional electron microscopy, with samples prepared by focused ion beam, are included.
Date: July 11, 2002
Creator: Choi, W.J.; Lee, T.Y.; Tu, K.N.; Tamura, N.; Celestre, R.S.; MacDowell, A.A. et al.
Partner: UNT Libraries Government Documents Department

A BEAMLINE FOR HIGH PRESSURE STUDIES AT THE ADVANCED LIGHT SOURCE WITH A SUPERCONDUCTING BENDING MAGNET AS THE SOURCE

Description: A new facility for high-pressure diffraction and spectroscopy using diamond anvil high-pressure cells has been built at the Advanced Light Source on Beamline 12.2.2. This beamline benefits from the hard X-radiation generated by a 6 Tesla superconducting bending magnet (superbend). Useful x-ray flux is available between 5 keV and 35 keV. The radiation is transferred from the superbend to the experimental enclosure by the brightness preserving optics of the beamline. These optics are comprised of: a plane parabola collimating mirror (M1), followed by a Kohzu monochromator vessel with a Si(111) crystals (E/{Delta}E {approx} 7000) and a W/B{sub 4}C multilayer (E/{Delta}E {approx} 100), and then a toroidal focusing mirror (M2) with variable focusing distance. The experimental enclosure contains an automated beam positioning system, a set of slits, ion chambers, the sample positioning goniometry and area detectors (CCD or image-plate detector). Future developments aim at the installation of a second end station dedicated for in situ laser-heating on one hand and a dedicated high-pressure single-crystal station, applying both monochromatic as well as polychromatic techniques.
Date: April 19, 2005
Creator: Kunz, M; MacDowell, A A; Caldwell, W A; Cambie, D; Celestre, R S; Domning, E E et al.
Partner: UNT Libraries Government Documents Department

Microtexture of Strain in electroplated copper interconnects

Description: The microstructure of narrow metal conductors in the electrical interconnections on IC chips has often been identified as of major importance in the reliability of these devices. The stresses and stress gradients that develop in the conductors as a result of thermal expansion differences in the materials and of electromigration at high current densities are believed to be strongly dependent on the details of the grain structure. The present work discusses new techniques based on microbeam x-ray diffraction (MBXRD) that have enabled measurement not only of the microstructure of totally encapsulated conductors but also of the local stresses in them on a micron and submicron scale. White x-rays from the Advanced Light Source were focused to a micron spot size by Kirkpatrick-Baez mirrors. The sample was stepped under the micro-beam and Laue images obtained at each sample location using a CCD area detector. Microstructure and local strain were deduced from these images. Cu lines with widths ranging from 0.8 mm to 5 mm and thickness of 1 mm were investigated. Comparisons are made between the capabilities of MBXRD and the well established techniques of broad beam XRD, electron back scatter diffraction (EBSD) and focused ion beam imagining (FIB).
Date: April 1, 2001
Creator: Spolenak, R.; Barr, D.L.; Gross, M.E.; Evans-Lutterodt, K.; Brown, W.L.; Tamura, N. et al.
Partner: UNT Libraries Government Documents Department

An aberration corrected photoemission electron microscope at the advanced light source

Description: Design of a new aberration corrected Photoemission electron microscope PEEM3 at the Advanced Light Source is outlined. PEEM3 will be installed on an elliptically polarized undulator beamline and will be used for the study of complex materials at high spatial and spectral resolution. The critical components of PEEM3 are the electron mirror aberration corrector and aberration-free magnetic beam separator. The models to calculate the optical properties of the electron mirror are discussed. The goal of the PEEM3 project is to achieve the highest possible transmission of the system at resolutions comparable to our present PEEM2 system (50 nm) and to enable significantly higher resolution, albeit at the sacrifice of intensity. We have left open the possibility to add an energy filter at a later date, if it becomes necessary driven by scientific need to improve the resolution further.
Date: November 1, 2003
Creator: Feng, J.; MacDowell, A.A.; Duarte, R.; Doran, A.; Forest, E.; Kelez, N. et al.
Partner: UNT Libraries Government Documents Department

High spatial resolution grain orientation and strain mapping in thin films using polychromatic submicron X-ray diffraction

Description: The availability of high brilliance synchrotron sources, coupled with recent progress in achromatic focusing optics and large area 2D detector technology, have allowed us to develop an X-ray synchrotron technique capable of mapping orientation and strain/stress in polycrystalline thin films with submicron spatial resolution. To demonstrate the capabilities of this instrument, we have employed it to study the microstructure of aluminum thin film structures at the granular and subgranular level. Owing to the relatively low absorption of X-rays in materials, this technique can be used to study passivated samples, an important advantage over most electron probes given the very different mechanical behavior of buried and unpassivated materials.
Date: March 26, 2002
Creator: Tamura, N.; MacDowell, A.A.; Celestre, R.S.; Padmore, H.A.; Valek, B.C.; Bravman, J.C. et al.
Partner: UNT Libraries Government Documents Department