Bias and self-bias of magnetic macroparticle filters for cathodic arc plasmas
Description:
Curved magnetic filters are often used for the removal of macroparticles from cathodic arc plasmas. This study addresses the need to further reduce losses and improving plasma throughput. The central figure of merit is the system coefficient Kappa defined as filtered ion current normalized by the plasma-producing arc current. The coefficient Kappa is investigated as a function of DC and pulsed magnetic field operation, magnetic field strength, external electric bias, and arc amplitude. It incre…
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Date:
December 1, 2002
Creator:
Byon, Eungsun & Anders, Andre
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