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New photolithography stepping machine

Description: A joint development project to design a new photolithography steeping machine capable of 150 nanometer overlay accuracy was completed by Ultratech Stepper and the Lawrence Livermore National Laboratory. The principal result of the project is a next-generation product that will strengthen the US position in step-and-repeat photolithography. The significant challenges addressed and solved in the project are the subject of this report. Design methods and new devices that have broader application to precision machine design are presented in greater detail while project specific information serves primarily as background and motivation.
Date: March 8, 1995
Creator: Hale, L.; Klingmann, J. & Markle, D.
Partner: UNT Libraries Government Documents Department

Sub-nanometer interferometry and precision turning for large optical fabrication

Description: At Lawrence Livermore National Laboratory (LLNL), we have the unique combination of precision turning and metrology capabilities critical to the fabrication of large optical elements. We have developed a self-referenced interferometer to measure errors in aspheric optics to sub- nanometer accuracy over 200-millimeter apertures, a dynamic range of 5{approximately}10. We have utilized diamond turning to figure optics for X-ray to IR wavelengths and, with fast-tool-servo technology, can move optical segments from off-axis to on-axis. With part capacities to 2.3-meters diameter and the metrology described above, segments of very large, ultra-lightweight mirrors can potentially be figured to final requirements. precision of diamond-turning will carryover although the surface finish may be degraded. Finally, the most critical component of a fabrication process is the metrology that enables an accurate part. Well characterized machines are very repeatable and part accuracy must come from proper metrology. A self- referencing interferometer has been developed that can measure accurately to sub-nanometer values. As with traditional interferometers, measurements are fast and post- processed data provides useful feedback to the user. The simplicity of the device allows it to be used on large optics and systems.
Date: April 1, 1999
Creator: Klingmann, J L & Sommargren, G E
Partner: UNT Libraries Government Documents Department

Precision Engineering within the National Ignition Campaign

Description: In this very brief talk, we'll discuss how precision engineering impacts 4 key areas of NIF: (1) Diamond turning of KDP crystals; (2) Mitigation of laser damage on optics; (3) Alignment of lasers, targets, diagnostics; (4) Target fabrication.
Date: February 17, 2010
Creator: Taylor, J S; Carlisle, K; Klingmann, J L; Geraghty, P; Saito, T T & Montesanti, R C
Partner: UNT Libraries Government Documents Department

Design and Use of a Novel Apparatus for Measuring Capsule Fill Hole Conductance

Description: Description and results of a novel apparatus for determining the flow conductance through a laser drilled hole in a spherical shell for inertial confinement fusion experiments are described. The instrument monitors the pressure of an enclosed volume containing the laser pressure drilled capsule as air bleeds through the hole into the shell. From these measurements one obtains the conductance of the fill hole. This system has proven to be a valuable tool for verifying the conduct conductance into the capsule in a timely and nondestructive manner.
Date: November 27, 2006
Creator: Seugling, R M; Nederbragt, W W; Klingmann, J L; Edson, S; Reynolds, J & Cook, R
Partner: UNT Libraries Government Documents Department

Fielding the NIF Cryogenic Ignition Target

Description: The United States Department of Energy has embarked on a campaign to conduct credible fusion ignition experiments on the National Ignition Facility (NIF) at the Lawrence Livermore National Laboratory in 2010. The target assembly specified for this campaign requires the formation of a deuterium/tritium (DT) fuel ice layer on the inside of a 2 millimeter diameter capsule positioned at the center of a 9 millimeter long by 5 millimeter diameter cylinder, called a hohlraum. The ice layer requires micrometer level accuracy and must be formed and maintained at temperatures below 19 K. At NIF shot time, the target must be positioned at the center of the NIF 10 meter diameter target chamber, aligned to the laser beam lines and held stable to less than 7 micrometers rms. We have completed the final design and are integrating the systems necessary to create, characterize and field the cryogenic target for ignition experiments. These designs, with emphasis on the challenges of fielding a precision cryogenic positioning system will be presented.
Date: February 28, 2008
Creator: Malsbury, T; Haid, B; Gibson, C; Atkinson, D; Skulina, K; Klingmann, J et al.
Partner: UNT Libraries Government Documents Department

Lessons from Two Years of Building Fusion Ignition Targets with the Precision Robotic Assembly Machine

Description: The Precision Robotic Assembly Machine was developed to manufacture the small and intricate laser-driven fusion ignition targets that are being used in the world's largest and most energetic laser, the National Ignition Facility (NIF). The National Ignition Campaign (NIC) goal of using the NIF to produce a self-sustaining nuclear fusion burn with energy gain - for the first time ever in a laboratory setting - requires targets that are demanding in materials fabrication, machining, and assembly. We provide an overview of the design and function of the machine, with emphasis on the aspects that revolutionized how NIC targets are manufactured.
Date: February 19, 2010
Creator: Montesanti, R C; Alger, E T; Atherton, L J; Bhandarkar, S D; Castro, C; Dzenitis, E G et al.
Partner: UNT Libraries Government Documents Department

Fabrication of DDS-3, an 11.4 GHz damped-detuned structure

Description: A 1.8 m X-band Damped-Detuned Structure (DDS-3) has been fabricated and characterized as part of the structure development program towards a TeV-scale e + e - linear collider. In this joint venture, the copper cells were precision-fabricated by LLNL, diffusion-bonded into a monolithic structure by KEK, and the structure completed and tested by SLAC. The overall process constitutes a baseline for future high-volume structure manufacture.
Date: March 1, 1999
Creator: Adolphsen, C; Asano, K; Elmer, J; Funchasi, Y; Higashi, Y; Higo, T et al.
Partner: UNT Libraries Government Documents Department