Description: A variety of problems exist in order to optimally apply resonance ionization spectroscopy (RIS) to the detection of sputtered neutral atoms, however. Several of these problems and their solutions are examined in this paper. First, the possible useful yields obtainable and the dependence of useful yield on various laser parameters for this type of sputtered neutral mass spectrometer (SNMS) are considered. Second, the choice of a mass spectrometer and its effect on the instrumental useful yield is explored in light of the unique ionization region for laser based SNMS. Finally a brief description of noise sources and their effect on the instrumental sensitivity is discussed. 33 refs., 12 figs.
Date: January 1, 1986
Creator: Young, C.E.; Pellin, M.J.; Calaway, W.F.; Joergensen, B.; Schweitzer, E.L. & Gruen, D.M.
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