4 Matching Results

Search Results

Advanced search parameters have been applied.

DSMC Simulation of thermal transpiration and accomodation pumps

Description: The Direct Simulation Monte Carlo (DSMC) technique is employed to evaluate several configurations of thermal transpiration and accommodation pumps. There is renewed interest in these rarefied flow pumping concepts for Micro-Electro-Mechanical Systems (MEMS) due to advances in micro-fabrication. The simulation results are compared with existing data to understand gas-surface interaction uncertainties in the experiments. Parametric studies are performed to determine the effects of Knudsen number and surface temperature and roughness on the maximum pump pressure ratio.
Date: November 1, 1998
Creator: Hudson, M.L. & Bartel, T.J.
Partner: UNT Libraries Government Documents Department

Gas transport by thermal transpiration in micro-channels -- A numerical study

Description: A reliable micro gas pump is an essential element to the development of many micro-systems for chemical gas analyses. At Sandia, the authors are exploring a different pumping mechanism, gas transport by thermal transpiration. Thermal transpiration refers to the rarefied gas dynamics developed in a micro-channel with a longitudinal temperature gradient. To investigate the potential of thermal transpiration for gas pumping in micro-systems, the authors have performed simulations and model analysis to design micro-devices and to assess their design performance before the fabrication process. The effort is to apply ICARUS (a Direct Simulation Monte Carlo code developed at Sandia) to characterize the fluid transport and evaluate the design performance. The design being considered has two plenums at different temperatures (hot and cold) separated by a micro-channel of 0.1 micron wide and 1 micron long. The temperature difference between the two plenums is 30 kelvin. ICARUS results, a quasi-steady analysis, predicts a net flow through the micro-channel with a velocity magnitude of about 0.4 m/s due to temperature gradient at the wall (thermal creep flow) at the early time. Later as the pressure builds up in the hot plenum, flow is reversed. Eventually when the system reaches steady state equilibrium, the net flow becomes zero. The thermal creep effect is compensated by the thermo-molecular pressure effect. This result demonstrates that it is important to include the thermo-molecular pressure effect when designing a pumping mechanism based on thermal transpiration. The DSMC technique can model this complex thermal transpiration problem.
Date: August 1, 1998
Creator: Wong, C.C.; Hudson, M.L.; Potter, D.L. & Bartel, T.J.
Partner: UNT Libraries Government Documents Department

Microfabricated silicon gas chromatographic micro-channels: fabrication and performance

Description: Using both wet and plasma etching, we have fabricated micro-channels in silicon substrates suitable for use as gas chromatography (GC) columns. Micro-channel dimensions range from 10 to 80 {micro}m wide, 200 to 400 {micro}m deep, and 10 cm to 100 cm long. Micro-channels 100 cm long take up as little as 1 cm{sup 2} on the substrate when fabricated with a high aspect ratio silicon etch (HARSE) process. Channels are sealed by anodically bonding Pyrex lids to the Si substrates. We have studied micro-channel flow characteristics to establish model parameters for system optimization. We have also coated these micro-channels with stationary phases and demonstrated GC separations. We believe separation performance can be improved by increasing stationary phase coating uniformity through micro-channel surface treatment prior to stationary phase deposition. To this end, we have developed microfabrication techniques to etch through silicon wafers using the HARSE process. Etching completely through the Si substrate facilitates the treatment and characterization of the micro- channel sidewalls, which domminate the GC physico-chemical interaction. With this approach, we separately treat the Pyrex lid surfaces that form the top and bottom surfaces of the GC flow channel.
Date: November 1, 1998
Creator: Matzke, C.M.; Kottenstette, R.J.; Casalnuovo, S.A.; Frye-Mason, G.C.; Hudson, M.L.; Sasaki, D.Y. et al.
Partner: UNT Libraries Government Documents Department

Design, testing, and simulation of microscale gas chromatography columns

Description: A microscale gas chromatography column is one component in a microscale chemistry laboratory for detecting chemical agents. Several columns were fabricated using the Bosch etch process which allows deep, high aspect ratio channels of rectangular cross-section. A design tool, based on analytical models, was developed to evaluate the effects of operating conditions and column specifications on separation resolution and time. The effects of slip flow, channel configuration, and cross-sectional shape were included to evaluate the differences between conventional round, straight columns and the microscale rectangular, spiral columns. Experimental data were obtained and compared with the predicted flowrates and theoretical number of plates. The design tool was then employed to select more optimum channel dimensions and operating conditions for high resolution separations.
Date: August 1998
Creator: Hudson, M. L.; Kottenstette, R.; Matzke, C. M.; Frye-Mason, G. C.; Shollenberger, K. A.; Adkins, D. R. et al.
Partner: UNT Libraries Government Documents Department