Description: A systematic measurement of experimental K/sub XSi/ factors, with particular emphasis on low Z microanalysis (6 less than or equal to 7 less than or equal to 32), at 200 kV for a KEVEX UTW Si(Li) detector fitted to a JEOL 200CX analytical microscope, using a variety of high purity standards has been carried out. Under normal operating conditions of a LaB/sub 6/ filament, it is shown that absorption in the specimen is very critical, particularly for heavy element matrices, and sample thicknesses need to be measured for accurate microanalysis of low Z elements (C,N,O). Using these measured K/sub XSi/ factors, quantitative UTW-EDX microanalysis has been routinely extended to carbon. 21 refs.
Date: July 1, 1987
Creator: Krishnan, K.M. & Echer, C.J.
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