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Carbon contamination topography analysis of EUV masks

Description: The impact of carbon contamination on extreme ultraviolet (EUV) masks is significant due to throughput loss and potential effects on imaging performance. Current carbon contamination research primarily focuses on the lifetime of the multilayer surfaces, determined by reflectivity loss and reduced throughput in EUV exposure tools. However, contamination on patterned EUV masks can cause additional effects on absorbing features and the printed images, as well as impacting the efficiency of cleanin… more
Date: March 12, 2010
Creator: Fan, Y.-J.; Yankulin, L.; Thomas, P.; Mbanaso, C.; Antohe, A.; Garg, R. et al.
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Partner: UNT Libraries Government Documents Department
open access

X-ray study of aligned magnetic stripe domains in perpendicular multilayers

Description: We have investigated the stripe domain structure and the magnetic reversal of perpendicular Co/Pt based multilayers at room temperature using magnetometry, magnetic imaging and magnetic x-ray scattering. In-plane field cycling aligns the stripe domains along the field direction. In magnetic x-ray scattering the parallel stripe domains act as a magnetic grating resulting in observed Bragg reflections up to 5th order. We model the scattering profile to extract and quantify the domain as well as d… more
Date: March 3, 2003
Creator: Hellwig, O.; Denbeaux, G. P.; Kortright, J. B. & Fullerton, Eric E.
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Partner: UNT Libraries Government Documents Department
open access

Magnetic imaging of ion-irradiation patterned Co/Pt multilayers using complementary electron and photon probes

Description: The three-dimensional magnetic structure and reversal mechanism of patterned Co/Pt multilayers, were imaged using complementary Lorentz transmission electron microscopy (LTEM) (in-plane component) and magnetic transmission x-ray microscopy (M-TXM) (perpendicular magnetization). The Co/Pt films with perpendicular anisotropy were patterned by ion irradiation through a stencil mask to produce in-plane magnetization in the irradiated regions. The boundaries of the patterns, defined by the transitio… more
Date: April 1, 2001
Creator: Kusinski, G.J.; Krishnan, K.M.; Denbeaux, G.; Thomas, G.; Terris, B.D. & Weller, D.
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Partner: UNT Libraries Government Documents Department
open access

Actinic Mask Inspection at the ALS Initial Design Review

Description: This report is the first milestone report for the actinic mask blank inspection project conducted at the VNL, which forms sub-section 3 of the Q1 2003 mask blank technology transfer program at the VNL. Specifically this report addresses deliverable 3.1.1--design review and preliminary tool design. The goal of this project is to design an actinic mask inspection tool capable of operating in two modes: high-speed scanning for the detection of multilayer defects (inspection mode), and a high-resol… more
Date: March 5, 2003
Creator: Barty, A.; Chapman, H.; Sweeney, D.; Levesque, R.; Bokor, J.; Gullikson, E. et al.
Item Type: Refine your search to only Report
Partner: UNT Libraries Government Documents Department
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