Description: A surface-micromachined MEMS process has been used to demonstrate multiple-input chemical sensing using selectively coated cantilever arrays. Combined hydrogen and mercury-vapor detection was achieved with a palm-sized, self-powered module with spread-spectrum telemetry reporting.
Date: March 11, 1999
Creator: Britton, C.L., Jr.; Brown, G.M.; Bryan, W.L.; Clonts, L.G.; DePriest, J.C.; Emergy, M.S. et al.
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