MEMS Adaptive Optics Devices: LDRD No. 02-1385 Summary Report
Description:
The primary goal of this portion of the LDRD is to develop a vertical programmable diffraction grating that can be fabricated with Sandia's Ultra-planar Multi-level MEMS Technology, the SUMMiT V{trademark} process. This grating is targeted for use in a chemical detection system dubbed the Polychromator. A secondary goal is to design diffraction grating structures with additional degrees of freedom (DOF). Gratings with 2.5 microns of vertical stroke have been realized. In addition, rotational DO…
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Date:
December 1, 2002
Creator:
DAGEL, DARYL J. & ALLEN, JAMES J.
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Partner:
UNT Libraries Government Documents Department