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Final report for the Sept. 1997 - Jan. 2000 period of Contract No. DE-FG02-97ER54445. Fundamental science of high-density fluorocarbon plasmas

Description: This report describes the results obtained during the two and a half years of work on the contract ''Fundamental Science of High-Density Fluorocarbon Plasmas.'' This program established critical elements of the scientific knowledge base of high-density fluorocarbon plasmas used for SiO{sub 2} patterning. To this end the authors characterized the species that exist in the gas phase and the processes that occur at relevant surfaces in contact with the plasma using complementary diagnostic instrumentation for plasma and surface characterization at two universities. By moving diagnostics from one university to the other, the full spectrum of diagnostics was applied to a single plasma reactor and fluorocarbon plasma etching process. The results of these measurements were correlated with data obtained when patterning SiO{sub 2} using identical conditions. In parallel, a reactive beam scattering system was employed to establish the consequences of the interaction of mass- and energy-resolved low-energy (20 to 300 eV) ions with SiO{sub 2} and resist surfaces.
Date: February 1, 2001
Creator: Oehrlein, G.S.; Anderson, H.M. & Cecchi, J.L.
Partner: UNT Libraries Government Documents Department

MIRI: A multichannel far-infrared laser interferometer for electron density measurements on TFTR (Tokamak Fusion Test Reactor)

Description: A ten-channel far-infrared laser interferometer which is routinely used to measure the spatial and temporal behavior of the electron density profile on the TFTR tokamak is described and representative results are presented. This system has been designed for remote operation in the very hostile environment of a fusion reactor. The possible expansion of the system to include polarimetric measurements is briefly outlined. 13 refs., 8 figs.
Date: July 1, 1987
Creator: Mansfield, D.K.; Park, H.K.; Johnson, L.C.; Anderson, H.M.; Chouinard, R.; Foote, V.S. et al.
Partner: UNT Libraries Government Documents Department

Quality assurance/quality control summary report on phase 2 of the Clinch River remedial investigation at the Oak Ridge Reservation, Oak Ridge, Tennessee

Description: Quality assurance (QA) objectives for Phase 2 were that (1) scientific data generated would withstand scientific and legal scrutiny; (2) data would be gathered using appropriate procedures for sample collection, sample handling and security, chain of custody, laboratory analyses, and data reporting; (3) data would be of known precision and accuracy; and (4) data would meet data quality objectives defined in the Phase 2 Sampling and Analysis Plan. A review of the QA systems and quality control (QC) data associated with the Phase 2 investigation is presented to evaluate whether the data were of sufficient quality to satisfy Phase 2 objectives. The data quality indicators of precision, accuracy, representativeness, comparability, completeness, and sensitivity were evaluated to determine any limitations associated with the data. Data were flagged with qualifiers that were associated with appropriate reason codes and documentation relating the qualifiers to the reviewer of the data. These qualifiers were then consolidated into an overall final qualifier to represent the quality of the data to the end user. In summary, reproducible, precise, and accurate measurements consistent with CRRI objectives and the limitations of the sampling and analytical procedures used were obtained for the data collected in support of the Phase 2 Remedial Investigation.
Date: December 1, 1996
Creator: Holladay, S.K.; Anderson, H.M.; Benson, S.B.; Bevelhimer, M.S.; Brandt, C.C.; Chavannes, C.M. et al.
Partner: UNT Libraries Government Documents Department