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High efficiency multilayer blazed gratings for EUV and soft X-rays: Recent developments

Description: Multilayer coated blazed gratings with high groove density are the best candidates for use in high resolution EUV and soft x-ray spectroscopy. Theoretical analysis shows that such a grating can be potentially optimized for high dispersion and spectral resolution in a desired high diffraction order without significant loss of diffraction efficiency. In order to realize this potential, the grating fabrication process should provide a perfect triangular groove profile and an extremely smooth surfa… more
Date: July 26, 2011
Creator: Voronov, Dmitriy; Ahn, Minseung; Anderson, Erik; Cambie, Rossana; Chang, Chih-Hao; Goray, Leonid et al.
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Partner: UNT Libraries Government Documents Department
open access

High-efficiency 5000 lines/mm multilayer-coated blazed grating for EUV wavelengths

Description: Volume x-ray gratings consisting of a multilayer coating deposited on a blazed substrate can diffract with very high efficiency even in high orders if diffraction conditions in-plane (grating) and out-of-plane (Bragg multilayer) are met simultaneously. This remarkable property however depends critically on the ability to create a structure with near atomic perfection. In this work we report on a method to produce these structures. We report measurements that show, for a 5000 l/mm grating diffra… more
Date: April 19, 2010
Creator: Voronov, Dmitriy; Ahn, Minseung; Anderson, Erik; Cambie, Rossana; Chang, Chih-Hao; Gullikson, Eric et al.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

5000 groove/mm multilayer-coated blazed grating with 33percent efficiency in the 3rd order in the EUV wavelength range

Description: We report on recent progress in developing diffraction gratings which can potentially provide extremely high spectral resolution of 105-106 in the EUV and soft x-ray photon energy ranges. Such a grating was fabricated by deposition of a multilayer on a substrate which consists ofa 6-degree blazed grating with a high groove density. The fabrication of the substrate gratings was based on scanning interference lithography and anisotropic wet etch of silicon single crystals. The optimized fabricati… more
Date: July 7, 2009
Creator: Lawrence Berkeley National Laboratory. Advanced Light Source.
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Partner: UNT Libraries Government Documents Department
open access

Ultra-high Resolution Optics for EUV and Soft X-ray Inelastic Scattering

Description: We describe a revolutionary new approach to high spectral resolution soft x-ray optics. Conventionally in the soft x-ray energy range, high spectral resolution is obtained by use of a relatively low line density grating operated in 1st order with small slits. This severely limits throughput. This limitation can be removed by use of a grating either in very high order, or with very high line density, if one can maintain high diffraction efficiency. We have developed a new technology for achievin… more
Date: September 16, 2009
Creator: Voronov, Dmitry L.; Cambie, Rossana; Ahn, Minseung; Anderson, Erik H.; Chang, Chih-Hao; Gullikson, Eric M. et al.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
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