Direct to Digital Holography
Description:
In this CRADA, Oak Ridge National Laboratory (ORNL) assisted nLine Corporation of Austin, TX in the development of prototype semiconductor wafer inspection tools based on the direct-to-digital holographic (DDH) techniques invented at ORNL. Key components of this work included, development of the first prototype named the Visible Alpha Tool (VAT) that uses visible spectrum illumination of 532 nm, assist in design of second prototype tool named the DUV Alpha Tool (DAT) using deep UV (266 nm) illu…
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Date:
June 15, 2003
Creator:
Bingham, P.R. & Tobin, K.W.
Item Type:
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Report
Partner:
UNT Libraries Government Documents Department