Electronic Sputtering of Solids by Slow, Highly Charged Ions: Fundamentals and Applications
Description:
Characterization tools have been developed to study the performance characteristics and reliability of surface micromachined actuators. These tools include (1) the ability to electrically stimulate or stress the actuator, (2) the capability to visually inspect the devices in operation, (3) a method for capturing operational information, and (4) a method to extract performance characteristics from the operational information. Additionally, a novel test structure has been developed to measure ele…
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Date:
July 23, 1999
Creator:
Banks, J. C.; Barnes, A. V.; Doyle, B. L.; Hamza, A. V.; Machicoane, G. A.; McDonald, J. W. et al.
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UNT Libraries Government Documents Department