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open access

Nanograting-based compact VUV spectrometer and beam profiler for in-situ characterization of high-order harmonic generation light sources

Description: A compact, versatile device for VUV beam characterization is presented. It combines the functionalities of a VUV spectrometer and a VUV beam profiler in one unit and is entirely supported by a standard DN200 CF flange. The spectrometer employs a silicon nitride transmission nanograting in combination with a micro-channel plate based imaging detector. This enables the simultaneous recording of wavelengths ranging from 10 nm to 80 nm with a resolution of 0.25 nm to 0.13 nm. Spatial beam profiles … more
Date: July 9, 2010
Creator: Kornilov, Oleg; Wilcox, Russell & Gessner, Oliver
Partner: UNT Libraries Government Documents Department
open access

Modeling and Imaging Flexural Plate Wave Devices

Description: Sandia National Laboratories is developing a new form of flexural plate wave device (FPW) for sensor applications. In this device, Lorentz forces cause out of plane vibrations in a silicon nitride membrane. Current induced in transducer lines on the membrane provides information about the amplitude and phase of these surface vibrations. By tracking the large amplitude vibrations that occur at resonant frequencies, it is possible to infer information about loading on the membrane. In fabricating… more
Date: July 9, 1999
Creator: Adkins, D. R.; Butler, M. A.; Chu, A. S. & Schubert, W. K.
Partner: UNT Libraries Government Documents Department
open access

Finite Element Modeling of a Microhotplate for Microfluidic Applications

Description: A hand-held chemical laboratory ({mu}ChemLab) is being developed that utilizes a silicon- nitride-supported microhotplate in the front-end, gas sampling and preconcentration stage. Device constraints include low-power (<200mW at 5V), rapid heating (<20msec), and a relatively uniform temperature distribution throughout the heated area ({approximately}3mm{sup 2}). To optimize for these criteria, the electro-thermal behavior of the microhotplate was modeled using Thermal Analysis System (TAS… more
Date: March 9, 1999
Creator: Benson, D. A.; Frye-Mason, G. C.; Manginell, R. P. & Rosato, D. A.
Partner: UNT Libraries Government Documents Department
open access

Evaluation of Creep Property of AS800 Silicon Nitride from As-Processed Surface Regions

Description: Tensile creep studies were carried out to evaluate the creep performance of AS800 silicon nitride samples extracted from the surface and bulk regions of as-processed billets at 1350 C in air. The objective of this study was to understand the creep properties of the silicon nitride in the as-processed surface region and determine if they are comparable to those obtained from the bulk region. The results indicated that samples from the as-processed surface region exhibited higher creep rates and … more
Date: March 9, 2001
Creator: Lin, H. T.
Partner: UNT Libraries Government Documents Department
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