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The Sandia MEMS Passive Shock Sensor : FY08 testing for functionality, model validation, and technology readiness.

This report summarizes the functional, model validation, and technology readiness testing of the Sandia MEMS Passive Shock Sensor in FY08. Functional testing of a large number of revision 4 parts showed robust and consistent performance. Model validation testing helped tune the models to match data well and identified several areas for future investigation related to high frequency sensitivity and thermal effects. Finally, technology readiness testing demonstrated the integrated elements of the… more

Date: October 1, 2008

Creator: Walraven, Jeremy Allen; Blecke, Jill; Baker, Michael Sean; Clemens, Rebecca C.; Mitchell, John Anthony; Brake, Matthew Robert et al.

Item Type: Report

Partner: UNT Libraries Government Documents Department

open access

Calibration of an interfacial force microscope for MEMS metrology : FY08-09 activities.

Progress in MEMS fabrication has enabled a wide variety of force and displacement sensing devices to be constructed. One device under intense development at Sandia is a passive shock switch, described elsewhere (Mitchell 2008). A goal of all MEMS devices, including the shock switch, is to achieve a high degree of reliability. This, in turn, requires systematic methods for validating device performance during each iteration of design. Once a design is finalized, suitable tools are needed to prov… more

Date: October 1, 2009

Creator: Houston, Jack E.; Baker, Michael Sean; Crowson, Douglas A.; Mitchell, John Anthony & Moore, Nathan W.