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Focused Ion beam source method and Apparatus

Description: A focused ion beam having a cross section of submicron diameter, a high ion current, and a narrow energy range is generated from a target comprised of particle source material by laser ablation. The method involves directing a laser beam having a cross section of critical diameter onto the target, producing a cloud of laser ablated particles having unique characteristics, and extracting and focusing a charged particle beam from the laser ablated cloud. The method is especially suited for produc… more
Date: August 17, 1998
Creator: Pellin, Michael J.; Lykke, Keith R. & Lill, Thorsten B.
Partner: UNT Libraries Government Documents Department
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