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Cost-Effective Method for Producing Self Supported Palladium Alloy Membranes for Use in Efficient Production of Coal Derived Hydrogen Quarterly Technical Progress Report: September 2003-January 2006

Description: In the past quarter, significant progress has been made in optimize the deposition and release characteristics of ultrathin (less than 4 micron) membranes from rigid silicon substrates. Specifically, we have conducted a series of statistically designed experiments to examine the effects of plasma cleaning and compliant layer deposition conditions on the stress, release and pinhole density of membranes deposited on 4 inch and 6 inch round substrates. With this information we have progressed to t… more
Date: January 1, 2006
Creator: Arps, J.
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Cost-Effective Method for Producing Self Supported Palladium Alloy Membranes for Use in Efficient Production of Coal Derived Hydrogen Quarterly Technical Progress Report: September 2003-July 2005, Revised

Description: Efforts in this quarter were concentrated on developing vacuum processing procedures to produce thinner (<4 {micro}m-thick), defect-free films over larger areas (>100 cm{sup 2}). We continued to test three different types of rigid supporting substrates, thermally oxidized silicon (10 cm diameter), polished borosilicate glass (10 cm diameter), and soda-lime glass (>100 cm{sup 2} areas), each representing a different cost, surface roughness, and chemistry. Mechanical integrity, defect de… more
Date: August 31, 2005
Creator: Lanning, B. & Arps, J.
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Cost-Effective Method for Producing Self Supported Palladium Alloy Membranes for Use in Efficient Production of Coal Derived Hydrogen Quarterly Technical Progress Report: September 2003-September 2005

Description: During the last quarter, new procedures were developed and implemented to improve reliability and repeatability of release characteristics from the temporary substrate (i.e., silicon wafer) and to minimize through-thickness defects in a 6-inch diameter film, 3 microns in thickness. With the new procedures, we have been able to consistently produce essentially stress free films, with zero or minimal defects (less than 5) across a 6-inch diameter area. (It is important to note that for those film… more
Date: October 28, 2005
Creator: Lanning, B. & Arps, J.
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